Charging suppression in focused-ion beam fabrication of visible subwavelength dielectric grating reflector using electron conducting polymer

Nanoscale periodic patterning on insulating materials using focused-ion beam (FIB) is challenging because of charging effect, which causes pattern distortion and resolution degradation. In this paper, the authors used a charging suppression scheme using electron conducting polymer for the implementa...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2015-11, Vol.33 (6)
Hauptverfasser:	Alias, Mohd Sharizal, Liao, Hsien-Yu, Ng, Tien Khee, Ooi, Boon Siew
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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