Improved performance of GaN-based light emitting diodes with nanopatterned sapphire substrates fabricated by wet chemical etching

The authors present a facile approach to the fabrication of nanopatterned sapphire substrates (NPSS) with concave pyramid structure by a wet etching method. The silica wet-etching mask on the sapphire substrate was prepared by using a colloidal monolayer templating strategy. NPSS with two different...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2015-05, Vol.33 (3)
Hauptverfasser:	Geng, Chong, Yan, Qingfeng, Dong, Peng, Shan, Liang, Du, Chengxiao, Wei, Tongbo, Hao, Zhibiao
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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