Embedding a carbon nanotube across the diameter of a solid state nanopore

A fabrication method for positioning and embedding a single-walled carbon nanotube (SWNT) across the diameter of a solid state nanopore is presented. Chemical vapor deposition (CVD) is used to grow SWNTs over arrays of focused ion beam (FIB) milled pores in a thin silicon nitride membrane. This typi...

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Veröffentlicht in:	Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2011-09, Vol.29 (5), p.053001-053001-4
Hauptverfasser:	Sadki, E. S., Garaj, S., Vlassarev, D., Golovchenko, J. A., Branton, D.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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