Analysis of charging effects on highly resistive materials under electron irradiation by using transient-absorbed-current method

Accumulation and relaxation properties of charge in highly resistive materials under electron irradiation were investigated by using an absorption current stimulated by sequential two-pulse electron beams. The amount of absorbed charge corresponding to induced surface charge was obtained from the ti...

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Veröffentlicht in:	Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2011-05, Vol.29 (3), p.031209-031209-6
Hauptverfasser:	Tsuno, Natsuki, Ominami, Yusuke, Ohta, Hiroya, Shinada, Hiroyuki, Makino, Hiroshi, Kimura, Yoshinobu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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