Integration, gap formation, and sharpening of III-V heterostructure nanowires by selective etching

Epitaxial growth of heterostructure nanowires allows for the definition of narrow sections with specific semiconductor composition. The authors demonstrate how postgrowth engineering of III-V heterostructure nanowires using selective etching can form gaps, sharpening of tips, and thin sections simul...

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Veröffentlicht in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2010-01, Vol.28 (1), p.21-26
Hauptverfasser: Kallesøe, Christian, Mølhave, Kristian, Larsen, Kasper F., Engstrøm, Daniel, Hansen, Torben M., Bøggild, Peter, Mårtensson, Thomas, Borgström, Magnus, Samuelson, Lars
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Sprache:eng
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