Photothermal excitation of a single-crystalline silicon cantilever for higher vibration modes in liquid

The authors analyze photothermal excitation of a single-crystalline silicon cantilever for higher vibration modes in liquid. The cantilever is bent by thermal stress generated by thermal diffusion in the direction perpendicular to the cantilever surface. Because the cantilever is made of a homogeneo...

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Veröffentlicht in:	Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2009-03, Vol.27 (2), p.964-968
Hauptverfasser:	Nishida, Shuhei, Kobayashi, Dai, Kawakatsu, Hideki, Nishimori, Yuki
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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