Hydrophobic/hydrophilic surface modification within buried air channels

Recently, a method for fabricating air channels using a photodefinable sacrificial material (Unity 2203P) with acid-catalyzed degradation at low temperature was reported [J. P. Jayachandran et al. J Microelectromech. Syst. 12, 147 (2003)]. The acid is created via a ‘photoacid’ generator (PAG) either...

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Veröffentlicht in:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2004-05, Vol.22 (3), p.953-960
Hauptverfasser:	Salas-Vernis, Jose Luis, Jayachandran, Joseph Paul, Park, Seongho, Kelleher, Hollie A., Bidstrup Allen, Sue Ann, Kohl, Paul A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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