Multicolumn cell: Evaluation of the proof of concept system

The beam performance of the electron optics proof of concept (POC) multicolumn-cell (MCC) system has been evaluated. The two beams at the near center of a 4×4 layout with 25 mm pitch show good uniformity and low interference. The MCC system is imaged with a variable-shaped beam and character project...

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Veröffentlicht in:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2004-05, Vol.22 (3), p.985-988
Hauptverfasser:	Haraguchi, T., Sakazaki, T., Satoh, T., Nakano, M., Hamaguchi, S., Kiuchi, T., Yabara, H., Yasuda, H.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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