Electrokinetic movement of micro-objects in fluids using microelectromechanical system electrode arrays

Electrokinetic movement of micro-objects in fluids using microelectromechanical system electrode arrays

In this article we demonstrate methods of transporting micro-objects in fluids using microelectromechanical system electrode arrays to generate nonuniform electric fields. We show the ability to control fluid flow through ac electro-osmosis and the ability to move micro-objects through dielectrophor...

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Veröffentlicht in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Surfaces, and Films, 2004-05, Vol.22 (3), p.831-836
Hauptverfasser: Ellerington, Neil, Hubbard, Ted, Kujath, Marek
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container_issue 3
container_start_page 831
container_title Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
container_volume 22
creator Ellerington, Neil
Hubbard, Ted
Kujath, Marek
description In this article we demonstrate methods of transporting micro-objects in fluids using microelectromechanical system electrode arrays to generate nonuniform electric fields. We show the ability to control fluid flow through ac electro-osmosis and the ability to move micro-objects through dielectrophoresis where the velocity is a function of the frequency, voltage, and spacing of arrays. Velocities in excess of 600 μm/s have been achieved with ac voltages as low as 7 V pp . In addition to one-dimensional arrays that provide single axis control, here we also investigate a two-dimensional array capable of planar control.
doi_str_mv 10.1116/1.1705585
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title Electrokinetic movement of micro-objects in fluids using microelectromechanical system electrode arrays
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