Emission statistics and the characterization of array current
The current from an array of field emitters is often dominated by a subset of tips. The impact of processes such as sputtering damage on the evolution of array current can be estimated based on a hyperbolic tip model if the distribution of the emitters in both work function and apex radius can be ap...
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| Veröffentlicht in: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2003-01, Vol.21 (1), p.412-417 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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