Observation of step-flow growth in femtosecond pulsed laser deposition of Si on Si(100)-2×1
Step-flow growth mode is observed for 100 fs pulsed laser deposition (fsPLD) of Si on vicinal Si(100)-2×1, while the Volmer–Weber mode is observed for fsPLD of Si on Si(100)-1×1. Reflection high-energy electron diffraction (RHEED) is used to in situ monitor the dynamics of the film growth while ex s...
Gespeichert in:
| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2002-11, Vol.20 (6), p.2068-2071 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!