Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators
This article investigates rectangular two-beam microelectromechanical thermal actuators and provides a method for their optimization. The thermal actuators investigated consisted of two asymmetric parallel arms,one thin and one wide. Under an electric current load, the thin arm heats and expands mor...
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| Veröffentlicht in: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Surfaces, and Films, 2002-05, Vol.20 (3), p.971-974 |
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| container_end_page | 974 |
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| container_issue | 3 |
| container_start_page | 971 |
| container_title | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
| container_volume | 20 |
| creator | Hickey, Ryan Kujath, Marek Hubbard, Ted |
| description | This article investigates rectangular two-beam microelectromechanical thermal actuators and provides a method for their optimization. The thermal actuators investigated consisted of two asymmetric parallel arms,one thin and one wide. Under an electric current load, the thin arm heats and expands more than the wide arm, thereby bending the entire structure. Simplified models of the heat transfer mechanisms are used to determine the temperature profile. From the thermal expressions for expansion of the arms, equations are derived to predict the deflection as well as the buckling loads. Measurements of the actuator deflection as a function of voltage are presented. Design guidelines are introduced for optimization of a thermal actuator. |
| doi_str_mv | 10.1116/1.1468654 |
| format | Article |
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Design guidelines are introduced for optimization of a thermal actuator.</description><subject>Buckling</subject><subject>Electric loads</subject><subject>Heat conduction</subject><subject>Heat convection</subject><subject>Heat radiation</subject><subject>Heat transfer coefficients</subject><subject>Microelectromechanical devices</subject><subject>Scanning electron microscopy</subject><subject>Thermal expansion</subject><subject>Thermoanalysis</subject><issn>0734-2101</issn><issn>1520-8559</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNp90EtLAzEUBeAgCtbqwn8wO1GYmvckSylqhYIb3QkhzYNGZiY1SZX6653aogvB1bmLjwP3AHCO4AQhxK_RBFEuOKMHYIQYhrVgTB6CEWwIrTGC6Bic5PwKIcQY8hF4mTldqpJ0n71Lle51u8khD4et4qqELnzqEmJfRV-Vj1gvnO6qLpgUXetMSbFzZqn7YHRblaVL3ZDalLUuMeVTcOR1m93ZPsfg-e72aTqr54_3D9ObeW2IZKX2FnsrJG4Ytl7yhZZ2gTEWlkojbCM8wQhTJkzDGy49E5ZIZy0SsIGIUELG4GLXu0rxbe1yUV3IxrWt7l1cZ9VQThBlfCsvd3J4IOfkvFql0Om0UQiq7YAKqf2Ag73a2WxC-R7hB7_H9AvVyvr_8N_mL6Jvf8k</recordid><startdate>20020501</startdate><enddate>20020501</enddate><creator>Hickey, Ryan</creator><creator>Kujath, Marek</creator><creator>Hubbard, Ted</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>7TC</scope></search><sort><creationdate>20020501</creationdate><title>Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators</title><author>Hickey, Ryan ; Kujath, Marek ; Hubbard, Ted</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c395t-fd2fd892752df96ba9db2228d49c8d78f3212458c76769f58d39edd1807013433</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Buckling</topic><topic>Electric loads</topic><topic>Heat conduction</topic><topic>Heat convection</topic><topic>Heat radiation</topic><topic>Heat transfer coefficients</topic><topic>Microelectromechanical devices</topic><topic>Scanning electron microscopy</topic><topic>Thermal expansion</topic><topic>Thermoanalysis</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hickey, Ryan</creatorcontrib><creatorcontrib>Kujath, Marek</creatorcontrib><creatorcontrib>Hubbard, Ted</creatorcontrib><collection>CrossRef</collection><collection>Mechanical Engineering Abstracts</collection><jtitle>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hickey, Ryan</au><au>Kujath, Marek</au><au>Hubbard, Ted</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators</atitle><jtitle>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films</jtitle><date>2002-05-01</date><risdate>2002</risdate><volume>20</volume><issue>3</issue><spage>971</spage><epage>974</epage><pages>971-974</pages><issn>0734-2101</issn><eissn>1520-8559</eissn><coden>JVTAD6</coden><abstract>This article investigates rectangular two-beam microelectromechanical thermal actuators and provides a method for their optimization. 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| fulltext | fulltext |
| identifier | ISSN: 0734-2101 |
| ispartof | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2002-05, Vol.20 (3), p.971-974 |
| issn | 0734-2101 1520-8559 |
| language | eng |
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| source | AIP Journals Complete |
| subjects | Buckling Electric loads Heat conduction Heat convection Heat radiation Heat transfer coefficients Microelectromechanical devices Scanning electron microscopy Thermal expansion Thermoanalysis |
| title | Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators |
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