Structural and electrical characteristics of Y2O3 films grown on oxidized Si(100) surface

Heteroepitaxial Y2O3 films were grown on oxidized and clean Si (100) surfaces by ion assisted evaporation under an ultrahigh vacuum. The crystalline structure, crystallinity, morphology, and electrical properties were investigated using various techniques. The crystallinity assessed by x-ray diffrac...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2001-01, Vol.19 (1), p.192-199
Hauptverfasser:	Cho, M.-H., Ko, D.-H., Choi, Y. G., Jeong, K., Lyo, I. W., Noh, D. Y., Kim, H. J., Whang, C. N.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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