Diagnosis of positive ions from the near-cathode region in a high-voltage pulsed corona discharge N2 plasma

Positive ions from the near-cathode region in a wire-plate high-voltage pulsed corona discharge nitrogen plasma were characterized using a molecular beam mass spectrometer under severe electromagnetic interference. The N+ current is 2–8 times greater than that of N2+ at N2 pressure of 5–25 Torr, pea...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2000-09, Vol.18 (5), p.2213-2216
Hauptverfasser:	Tang, Shukai, Wang, Wenchun, Liu, Jiahong, Yang, Xuefeng, Wu, Yan
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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