Abatement of C2F6 in rf and microwave plasma reactors

Experimental results in a low temperature, low power density rf plasma reactor show that C2F6 can be decomposed by plasma reaction with oxygen, but CF4, an undesirable byproduct, is produced. Previously, it had been shown in a high temperature, high power density microwave reactor that C2F6 can be d...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2000-09, Vol.18 (5), p.2217-2223
Hauptverfasser:	Vitale, Steven A., Sawin, Herbert H.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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