Laser Diagnostics of Plasma in Synthesis of Graphene-Based Materials

Rotational temperature profiles of H2 in a microwave plasma chemical vapor deposition (MPCVD) reactor were measured via coherent anti-Stokes Raman scattering (CARS) spectroscopy. The temperature was found to increase with reactor pressure, plasma generator power, and distance from the deposition sur...

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Veröffentlicht in:	Journal of micro and nano-manufacturing 2014-09, Vol.2 (3)
Hauptverfasser:	Tuesta, Alfredo D, Bhuiyan, Aizaz, Lucht, Robert P, Fisher, Timothy S
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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