Rapid Harmonic Analysis of Piezoelectric MEMS Resonators

This paper reports on a novel simulation method combining the speed of analytical evaluation with the accuracy of finite-element analysis (FEA). This method is known as the rapid analytical-FEA technique (RAFT). The ability of the RAFT to accurately predict frequency response orders of magnitude fas...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2018-06, Vol.65 (6), p.979-990
Hauptverfasser:	Puder, Jonathan M., Pulskamp, Jeffrey S., Rudy, Ryan Q., Cassella, Cristian, Rinaldi, Matteo, Guofeng Chen, Bhave, Sunil A., Polcawich, Ronald G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical models Electric fields Electrodes Integrated circuit modeling Mathematical model Microelectromechanical systems (MEMS) modeling piezoelectric Resonant frequency resonator Resonators spurious mode
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