Characterization of cMUTs in rarefied gases
The performance of capacitive micromachined ultrasonic transducers (cMUTs) was investigated at low pressures in various gases such as air, carbon dioxide, and helium. The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind v...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2007-05, Vol.54 (5), p.1065-1071 |
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| container_end_page | 1071 |
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| container_issue | 5 |
| container_start_page | 1065 |
| container_title | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| container_volume | 54 |
| creator | Davis, L.A.J. Hutchins, D.A. Noble, R.A. |
| description | The performance of capacitive micromachined ultrasonic transducers (cMUTs) was investigated at low pressures in various gases such as air, carbon dioxide, and helium. The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible. It is demonstrated that cMUTs are capable of operating at low pressures, and the response to pressures below terrestrial atmospheric values is observed experimentally and compared to theoretical predictions. The center frequency of operation and sensitivity are both observed to be affected by changing pressures |
| doi_str_mv | 10.1109/TUFFC.2007.352 |
| format | Article |
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The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible. It is demonstrated that cMUTs are capable of operating at low pressures, and the response to pressures below terrestrial atmospheric values is observed experimentally and compared to theoretical predictions. 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(IEEE) 2007</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c433t-6f09764bce25e25147ce6b23297f519f43aeda9bbfe64f473b65a64dd5116fe33</citedby><cites>FETCH-LOGICAL-c433t-6f09764bce25e25147ce6b23297f519f43aeda9bbfe64f473b65a64dd5116fe33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4225318$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>315,781,785,797,27929,27930,54763</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4225318$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18733720$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/17523571$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Davis, L.A.J.</creatorcontrib><creatorcontrib>Hutchins, D.A.</creatorcontrib><creatorcontrib>Noble, R.A.</creatorcontrib><title>Characterization of cMUTs in rarefied gases</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>The performance of capacitive micromachined ultrasonic transducers (cMUTs) was investigated at low pressures in various gases such as air, carbon dioxide, and helium. The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible. It is demonstrated that cMUTs are capable of operating at low pressures, and the response to pressures below terrestrial atmospheric values is observed experimentally and compared to theoretical predictions. The center frequency of operation and sensitivity are both observed to be affected by changing pressures</description><subject>Acoustic measurements</subject><subject>Acoustic transducers</subject><subject>Acoustical measurements and instrumentation</subject><subject>Acoustics</subject><subject>Carbon dioxide</subject><subject>Equipment Design</subject><subject>Equipment Failure Analysis</subject><subject>Exact sciences and technology</subject><subject>Fluid flow measurement</subject><subject>Frequency</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Gases</subject><subject>Gases - chemistry</subject><subject>Low pressure</subject><subject>Mars</subject><subject>Micromachining</subject><subject>Micromechanics</subject><subject>Miniaturization</subject><subject>Physics</subject><subject>Piezoelectric transducers</subject><subject>Pressure</subject><subject>Rarefied gases</subject><subject>Reproducibility of Results</subject><subject>Sensitivity and Specificity</subject><subject>Transducers</subject><subject>Transduction; acoustical devices for the generation and reproduction of sound</subject><subject>Ultrasonic transducers</subject><subject>Ultrasonography - instrumentation</subject><subject>Ultrasonography - methods</subject><subject>Velocity measurement</subject><subject>Wind speed</subject><subject>Wind velocity measurement</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><sourceid>EIF</sourceid><recordid>eNqF0U1rGzEQBmAREmrH7TWXQFgKbQ5hXUmjrz0WE6cBh17ss9BqR-0ae9eR7EP76yPXpoYcEhDooEfDzLyEXDE6ZoxW3-aL6XQy5pTqMUh-RoZMclmaSspzMqTGyBIoowNymdKSUiZExT-QAdOSg9RsSO4mv110foux_eu2bd8VfSj802KeirYroosYWmyKXy5h-kguglsl_HS8R2QxvZ9PfpSznw-Pk--z0guAbakCrbQStUcu82FCe1Q1B17pIFkVBDhsXFXXAZUIQkOtpFOiaSRjKiDAiNwe6m5i_7zDtLXrNnlcrVyH_S5ZY6jSnFU6y69vSk2lkAbeh5AXQw3fw8-v4LLfxS6Pa40SnHMQ-wbHB-Rjn1Jekd3Edu3iH8uo3cdi_8Vi97HYHEv-cHOsuqvX2Jz4MYcMvhyBS96tQnSdb9PJGQ2gOc3u-uBaRPz_nPuSwAy8AMLemrQ</recordid><startdate>20070501</startdate><enddate>20070501</enddate><creator>Davis, L.A.J.</creator><creator>Hutchins, D.A.</creator><creator>Noble, R.A.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible. It is demonstrated that cMUTs are capable of operating at low pressures, and the response to pressures below terrestrial atmospheric values is observed experimentally and compared to theoretical predictions. The center frequency of operation and sensitivity are both observed to be affected by changing pressures</abstract><cop>New York, NY</cop><pub>IEEE</pub><pmid>17523571</pmid><doi>10.1109/TUFFC.2007.352</doi><tpages>7</tpages></addata></record> |
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| ispartof | IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2007-05, Vol.54 (5), p.1065-1071 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acoustic measurements Acoustic transducers Acoustical measurements and instrumentation Acoustics Carbon dioxide Equipment Design Equipment Failure Analysis Exact sciences and technology Fluid flow measurement Frequency Fundamental areas of phenomenology (including applications) Gases Gases - chemistry Low pressure Mars Micromachining Micromechanics Miniaturization Physics Piezoelectric transducers Pressure Rarefied gases Reproducibility of Results Sensitivity and Specificity Transducers Transduction acoustical devices for the generation and reproduction of sound Ultrasonic transducers Ultrasonography - instrumentation Ultrasonography - methods Velocity measurement Wind speed Wind velocity measurement |
| title | Characterization of cMUTs in rarefied gases |
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