Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO/sub 2//ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully app...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2004-10, Vol.51 (10), p.1308-1313
Hauptverfasser:	Shikata, S.-I., Hachigo, A., Nakahata, H., Narita, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic waves Narrowband Piezoelectric films Resonator filters Surface acoustic wave devices Surface acoustic waves Temperature Wafer bonding Wideband Zinc oxide
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