Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO/sub 2//ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully app...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2004-10, Vol.51 (10), p.1308-1313
Hauptverfasser:	Shikata, S.-I., Hachigo, A., Nakahata, H., Narita, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic waves Narrowband Piezoelectric films Resonator filters Surface acoustic wave devices Surface acoustic waves Temperature Wafer bonding Wideband Zinc oxide
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page	1313
container_issue	10
container_start_page	1308
container_title	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
container_volume	51
creator	Shikata, S.-I. Hachigo, A. Nakahata, H. Narita, M.
description	High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO/sub 2//ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO/sub 3/ on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO/sub 3//diamond with the assumption that the LiNbO/sub 3/ film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO/sub 3//diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.
doi_str_mv	10.1109/TUFFC.2004.1350959
format	Article
fullrecord	<record><control><sourceid>crossref_RIE</sourceid><recordid>TN_cdi_crossref_primary_10_1109_TUFFC_2004_1350959</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1350959</ieee_id><sourcerecordid>10_1109_TUFFC_2004_1350959</sourcerecordid><originalsourceid>FETCH-LOGICAL-c1129-ec8ccb53925dc5474c9858ed09155c59a0f9875916e6076fa3b0005dae90759c3</originalsourceid><addsrcrecordid>eNpFkMFOwkAQhjdGExF9Ab3sC5TOth3YORoiaoJyEM7NdLqNa4CaXarx7aXSxNMk__zff_iUujUwMQYoXW8Wi_kkAygmJkcgpDM1MphhYgnxXI3AWkxyMHCprmL8ADBFQdlIvbz5Xbflg2_3um20vHNgObjg48FL7CPWS_9ardLYVTpP09rzrt3XOnahYXGape36rv7mL3etLhreRncz3LHaLB7W86dkuXp8nt8vEzEmo8SJFakwpwxrwWJWCFm0rgYyiILE0JCdIZmpm8Js2nBeAQDW7AiOseRjlZ12JbQxBteUn8HvOPyUBspeSPknpOyFlIOQI3R3grxz7h8Yvr-1O1vU</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave</title><source>IEEE Electronic Library (IEL)</source><creator>Shikata, S.-I. ; Hachigo, A. ; Nakahata, H. ; Narita, M.</creator><creatorcontrib>Shikata, S.-I. ; Hachigo, A. ; Nakahata, H. ; Narita, M.</creatorcontrib><description>High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO/sub 2//ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO/sub 3/ on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO/sub 3//diamond with the assumption that the LiNbO/sub 3/ film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO/sub 3//diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2004.1350959</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acoustic waves ; Narrowband ; Piezoelectric films ; Resonator filters ; Surface acoustic wave devices ; Surface acoustic waves ; Temperature ; Wafer bonding ; Wideband ; Zinc oxide</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2004-10, Vol.51 (10), p.1308-1313</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c1129-ec8ccb53925dc5474c9858ed09155c59a0f9875916e6076fa3b0005dae90759c3</citedby><cites>FETCH-LOGICAL-c1129-ec8ccb53925dc5474c9858ed09155c59a0f9875916e6076fa3b0005dae90759c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1350959$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1350959$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Shikata, S.-I.</creatorcontrib><creatorcontrib>Hachigo, A.</creatorcontrib><creatorcontrib>Nakahata, H.</creatorcontrib><creatorcontrib>Narita, M.</creatorcontrib><title>Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><description>High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO/sub 2//ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO/sub 3/ on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO/sub 3//diamond with the assumption that the LiNbO/sub 3/ film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO/sub 3//diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.</description><subject>Acoustic waves</subject><subject>Narrowband</subject><subject>Piezoelectric films</subject><subject>Resonator filters</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>Temperature</subject><subject>Wafer bonding</subject><subject>Wideband</subject><subject>Zinc oxide</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2004</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpFkMFOwkAQhjdGExF9Ab3sC5TOth3YORoiaoJyEM7NdLqNa4CaXarx7aXSxNMk__zff_iUujUwMQYoXW8Wi_kkAygmJkcgpDM1MphhYgnxXI3AWkxyMHCprmL8ADBFQdlIvbz5Xbflg2_3um20vHNgObjg48FL7CPWS_9ardLYVTpP09rzrt3XOnahYXGape36rv7mL3etLhreRncz3LHaLB7W86dkuXp8nt8vEzEmo8SJFakwpwxrwWJWCFm0rgYyiILE0JCdIZmpm8Js2nBeAQDW7AiOseRjlZ12JbQxBteUn8HvOPyUBspeSPknpOyFlIOQI3R3grxz7h8Yvr-1O1vU</recordid><startdate>200410</startdate><enddate>200410</enddate><creator>Shikata, S.-I.</creator><creator>Hachigo, A.</creator><creator>Nakahata, H.</creator><creator>Narita, M.</creator><general>IEEE</general><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>200410</creationdate><title>Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave</title><author>Shikata, S.-I. ; Hachigo, A. ; Nakahata, H. ; Narita, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1129-ec8ccb53925dc5474c9858ed09155c59a0f9875916e6076fa3b0005dae90759c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Acoustic waves</topic><topic>Narrowband</topic><topic>Piezoelectric films</topic><topic>Resonator filters</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>Temperature</topic><topic>Wafer bonding</topic><topic>Wideband</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shikata, S.-I.</creatorcontrib><creatorcontrib>Hachigo, A.</creatorcontrib><creatorcontrib>Nakahata, H.</creatorcontrib><creatorcontrib>Narita, M.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Shikata, S.-I.</au><au>Hachigo, A.</au><au>Nakahata, H.</au><au>Narita, M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave</atitle><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle><stitle>T-UFFC</stitle><date>2004-10</date><risdate>2004</risdate><volume>51</volume><issue>10</issue><spage>1308</spage><epage>1313</epage><pages>1308-1313</pages><issn>0885-3010</issn><eissn>1525-8955</eissn><coden>ITUCER</coden><abstract>High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO/sub 2//ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO/sub 3/ on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO/sub 3//diamond with the assumption that the LiNbO/sub 3/ film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO/sub 3//diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.</abstract><pub>IEEE</pub><doi>10.1109/TUFFC.2004.1350959</doi><tpages>6</tpages></addata></record>
fulltext	fulltext_linktorsrc
identifier	ISSN: 0885-3010
ispartof	IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2004-10, Vol.51 (10), p.1308-1313
issn	0885-3010 1525-8955
language	eng
recordid	cdi_crossref_primary_10_1109_TUFFC_2004_1350959
source	IEEE Electronic Library (IEL)
subjects	Acoustic waves Narrowband Piezoelectric films Resonator filters Surface acoustic wave devices Surface acoustic waves Temperature Wafer bonding Wideband Zinc oxide
title	Simulation of characteristics of a LiNbO/sub 3//diamond surface acoustic wave
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T10%3A11%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Simulation%20of%20characteristics%20of%20a%20LiNbO/sub%203//diamond%20surface%20acoustic%20wave&rft.jtitle=IEEE%20transactions%20on%20ultrasonics,%20ferroelectrics,%20and%20frequency%20control&rft.au=Shikata,%20S.-I.&rft.date=2004-10&rft.volume=51&rft.issue=10&rft.spage=1308&rft.epage=1313&rft.pages=1308-1313&rft.issn=0885-3010&rft.eissn=1525-8955&rft.coden=ITUCER&rft_id=info:doi/10.1109/TUFFC.2004.1350959&rft_dat=%3Ccrossref_RIE%3E10_1109_TUFFC_2004_1350959%3C/crossref_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=1350959&rfr_iscdi=true