Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference

The 2022 ASMC, our 33rd, returned to Saratoga Springs, NY as an in-person conference after 2 years as a virtual conference. While we are all grateful for the digital world's enhancements that allowed this conference to be held remotely, attendees were happy to return to an in-person event where...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on semiconductor manufacturing 2023-08, Vol.36 (3), p.307-310
Hauptverfasser: Bickford, Jeanne Paulette, Patterson, Oliver D., Le Cunff, Delphine, Buengener, Ralf, Radloff, Stefan, Werbaneth, Paul
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 310
container_issue 3
container_start_page 307
container_title IEEE transactions on semiconductor manufacturing
container_volume 36
creator Bickford, Jeanne Paulette
Patterson, Oliver D.
Le Cunff, Delphine
Buengener, Ralf
Radloff, Stefan
Werbaneth, Paul
description The 2022 ASMC, our 33rd, returned to Saratoga Springs, NY as an in-person conference after 2 years as a virtual conference. While we are all grateful for the digital world's enhancements that allowed this conference to be held remotely, attendees were happy to return to an in-person event where networking is much easier.
doi_str_mv 10.1109/TSM.2023.3297059
format Article
fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_crossref_primary_10_1109_TSM_2023_3297059</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>10209219</ieee_id><sourcerecordid>2845770455</sourcerecordid><originalsourceid>FETCH-LOGICAL-c287t-8789f8c186695e88f94827e3573c3824a73bed768351b8527a43d617e106350f3</originalsourceid><addsrcrecordid>eNpNkE1PAjEQhhujiYjePXho4nmxn9v2SAgiCcQDeK6lO9Ul0MXuron_3iIcTCaZy_O-k3kQuqdkRCkxT-vVcsQI4yPOjCLSXKABlVIXjAt5iQZEG1GUkqhrdNO2W0KoEEYN0Push7bD06rumlS7HV4dwP9t8F3dRJyn-wScqxleTZdzPK6-XfRQZWJf-yZWvc9RvHSxD853farjB540MUCCzN2iq-B2Ldyd9xC9PU_Xk5di8TqbT8aLwjOtukIrbYL2VJelkaB1MEIzBVwq7rlmwim-gUqVmku60ZIpJ3hVUgWUlFySwIfo8dR7SM3X8Se7bfoU80nLtJBKESFlpsiJ8qlp2wTBHlK9d-nHUmKPHm32aI8e7dljjjycIjUA_MMZMYwa_guFg2xd</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2845770455</pqid></control><display><type>article</type><title>Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference</title><source>IEEE Electronic Library (IEL)</source><creator>Bickford, Jeanne Paulette ; Patterson, Oliver D. ; Le Cunff, Delphine ; Buengener, Ralf ; Radloff, Stefan ; Werbaneth, Paul</creator><creatorcontrib>Bickford, Jeanne Paulette ; Patterson, Oliver D. ; Le Cunff, Delphine ; Buengener, Ralf ; Radloff, Stefan ; Werbaneth, Paul</creatorcontrib><description>The 2022 ASMC, our 33rd, returned to Saratoga Springs, NY as an in-person conference after 2 years as a virtual conference. While we are all grateful for the digital world's enhancements that allowed this conference to be held remotely, attendees were happy to return to an in-person event where networking is much easier.</description><identifier>ISSN: 0894-6507</identifier><identifier>EISSN: 1558-2345</identifier><identifier>DOI: 10.1109/TSM.2023.3297059</identifier><identifier>CODEN: ITSMED</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Meetings ; Semiconductor device manufacture ; Special issues and sections</subject><ispartof>IEEE transactions on semiconductor manufacturing, 2023-08, Vol.36 (3), p.307-310</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2023</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><orcidid>0000-0002-9547-0069</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/10209219$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/10209219$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Bickford, Jeanne Paulette</creatorcontrib><creatorcontrib>Patterson, Oliver D.</creatorcontrib><creatorcontrib>Le Cunff, Delphine</creatorcontrib><creatorcontrib>Buengener, Ralf</creatorcontrib><creatorcontrib>Radloff, Stefan</creatorcontrib><creatorcontrib>Werbaneth, Paul</creatorcontrib><title>Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference</title><title>IEEE transactions on semiconductor manufacturing</title><addtitle>TSM</addtitle><description>The 2022 ASMC, our 33rd, returned to Saratoga Springs, NY as an in-person conference after 2 years as a virtual conference. While we are all grateful for the digital world's enhancements that allowed this conference to be held remotely, attendees were happy to return to an in-person event where networking is much easier.</description><subject>Meetings</subject><subject>Semiconductor device manufacture</subject><subject>Special issues and sections</subject><issn>0894-6507</issn><issn>1558-2345</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpNkE1PAjEQhhujiYjePXho4nmxn9v2SAgiCcQDeK6lO9Ul0MXuron_3iIcTCaZy_O-k3kQuqdkRCkxT-vVcsQI4yPOjCLSXKABlVIXjAt5iQZEG1GUkqhrdNO2W0KoEEYN0Push7bD06rumlS7HV4dwP9t8F3dRJyn-wScqxleTZdzPK6-XfRQZWJf-yZWvc9RvHSxD853farjB540MUCCzN2iq-B2Ldyd9xC9PU_Xk5di8TqbT8aLwjOtukIrbYL2VJelkaB1MEIzBVwq7rlmwim-gUqVmku60ZIpJ3hVUgWUlFySwIfo8dR7SM3X8Se7bfoU80nLtJBKESFlpsiJ8qlp2wTBHlK9d-nHUmKPHm32aI8e7dljjjycIjUA_MMZMYwa_guFg2xd</recordid><startdate>20230801</startdate><enddate>20230801</enddate><creator>Bickford, Jeanne Paulette</creator><creator>Patterson, Oliver D.</creator><creator>Le Cunff, Delphine</creator><creator>Buengener, Ralf</creator><creator>Radloff, Stefan</creator><creator>Werbaneth, Paul</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-9547-0069</orcidid></search><sort><creationdate>20230801</creationdate><title>Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference</title><author>Bickford, Jeanne Paulette ; Patterson, Oliver D. ; Le Cunff, Delphine ; Buengener, Ralf ; Radloff, Stefan ; Werbaneth, Paul</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c287t-8789f8c186695e88f94827e3573c3824a73bed768351b8527a43d617e106350f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Meetings</topic><topic>Semiconductor device manufacture</topic><topic>Special issues and sections</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bickford, Jeanne Paulette</creatorcontrib><creatorcontrib>Patterson, Oliver D.</creatorcontrib><creatorcontrib>Le Cunff, Delphine</creatorcontrib><creatorcontrib>Buengener, Ralf</creatorcontrib><creatorcontrib>Radloff, Stefan</creatorcontrib><creatorcontrib>Werbaneth, Paul</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on semiconductor manufacturing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Bickford, Jeanne Paulette</au><au>Patterson, Oliver D.</au><au>Le Cunff, Delphine</au><au>Buengener, Ralf</au><au>Radloff, Stefan</au><au>Werbaneth, Paul</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference</atitle><jtitle>IEEE transactions on semiconductor manufacturing</jtitle><stitle>TSM</stitle><date>2023-08-01</date><risdate>2023</risdate><volume>36</volume><issue>3</issue><spage>307</spage><epage>310</epage><pages>307-310</pages><issn>0894-6507</issn><eissn>1558-2345</eissn><coden>ITSMED</coden><abstract>The 2022 ASMC, our 33rd, returned to Saratoga Springs, NY as an in-person conference after 2 years as a virtual conference. While we are all grateful for the digital world's enhancements that allowed this conference to be held remotely, attendees were happy to return to an in-person event where networking is much easier.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TSM.2023.3297059</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0002-9547-0069</orcidid><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0894-6507
ispartof IEEE transactions on semiconductor manufacturing, 2023-08, Vol.36 (3), p.307-310
issn 0894-6507
1558-2345
language eng
recordid cdi_crossref_primary_10_1109_TSM_2023_3297059
source IEEE Electronic Library (IEL)
subjects Meetings
Semiconductor device manufacture
Special issues and sections
title Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-19T02%3A40%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Guest%20Editorial%20Special%20Section%20on%20the%202022%20SEMI%20Advanced%20Semiconductor%20Manufacturing%20Conference&rft.jtitle=IEEE%20transactions%20on%20semiconductor%20manufacturing&rft.au=Bickford,%20Jeanne%20Paulette&rft.date=2023-08-01&rft.volume=36&rft.issue=3&rft.spage=307&rft.epage=310&rft.pages=307-310&rft.issn=0894-6507&rft.eissn=1558-2345&rft.coden=ITSMED&rft_id=info:doi/10.1109/TSM.2023.3297059&rft_dat=%3Cproquest_RIE%3E2845770455%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2845770455&rft_id=info:pmid/&rft_ieee_id=10209219&rfr_iscdi=true