Variation

Variation afflicts the design, manufacture, and operation of integrated circuits. Techniques and tools are needed in three areas to address variation: statistical metrology, advanced process control, and design for manufacturability. First, statistical metrology seeks to characterize and model varia...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2008-02, Vol.21 (1), p.63-71
Hauptverfasser:	Boning, D.S., Balakrishnan, K., Hong Cai, Drego, N., Farahanchi, A., Gettings, K.M., Lim Daihyun, Somani, A., Taylor, H., Truque, D., Xie Xiaolin
Format:	Artikel
Sprache:	eng
Schlagworte:	Aggregates Applied sciences Circuit testing Circuits Control systems Design for manufacturability Design for manufacturability (DFM) Design for manufacture Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuit manufacture Integrated circuits Manufacturing processes Material properties Materials Materials testing Metrology Process control Process design Regularity Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors statistical process control Testing, measurement, noise and reliability variation yield
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