Guest Editorial Special Section On ICMTS'97
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Veröffentlicht in: | IEEE transactions on semiconductor manufacturing 1998-05, Vol.11 (2), p.181-181 |
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container_title | IEEE transactions on semiconductor manufacturing |
container_volume | 11 |
creator | Bair, L.A. |
description | |
doi_str_mv | 10.1109/TSM.1998.670149 |
format | Article |
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identifier | ISSN: 0894-6507 |
ispartof | IEEE transactions on semiconductor manufacturing, 1998-05, Vol.11 (2), p.181-181 |
issn | 0894-6507 1558-2345 |
language | eng |
recordid | cdi_crossref_primary_10_1109_TSM_1998_670149 |
source | IEEE Electronic Library (IEL) |
subjects | Certification CMOS technology Conferences Feedback Interface states Manufacturing processes Materials testing Microelectronics MOSFETs Very large scale integration |
title | Guest Editorial Special Section On ICMTS'97 |
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