Guest Editorial Special Section On ICMTS'97

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Veröffentlicht in:IEEE transactions on semiconductor manufacturing 1998-05, Vol.11 (2), p.181-181
1. Verfasser: Bair, L.A.
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container_title IEEE transactions on semiconductor manufacturing
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creator Bair, L.A.
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doi_str_mv 10.1109/TSM.1998.670149
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identifier ISSN: 0894-6507
ispartof IEEE transactions on semiconductor manufacturing, 1998-05, Vol.11 (2), p.181-181
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language eng
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source IEEE Electronic Library (IEL)
subjects Certification
CMOS technology
Conferences
Feedback
Interface states
Manufacturing processes
Materials testing
Microelectronics
MOSFETs
Very large scale integration
title Guest Editorial Special Section On ICMTS'97
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