Impedance Characteristic Analysis and Preliminary Experimental Results of a High-Power RF Plasma Source

To study the characteristics of radio frequency (RF) power coupling, RF plasma diagnostics, actively cooled tube, and negative ion production, a plasma source was designed as a small-scale test facility. The matching network was carefully designed and successfully applied to the 2-MHz RF plasma sour...

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Veröffentlicht in:	IEEE transactions on plasma science 2022-04, Vol.50 (4), p.775-781
Hauptverfasser:	Yang, Puqiong, Liu, Bo, Jiang, Caichao, Yang, Xin, Wei, Jianglong, Xie, Yahong, Xu, Yongjian, Liang, Lizhen, Zhao, Yuanzhe, Xie, Yuanlai, Wang, Jinxin, Hu, Chundong
Format:	Artikel
Sprache:	eng
Schlagworte:	Antennas Argon discharge Artificial neural networks Coupling Discharges (electric) Equivalence impedance matching inductively coupled plasma Low level Matching Negative ions neutral beam injection Particle beams Plasma Plasma diagnostics Plasma sources Plasmas power coupling efficiency Radio frequency Test facilities
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