A Model for the Bulk Plasma in an RF Chlorne Discharge

A model has been constructed to describe the electrical characteristics of the central bulk plasma region in a 13.56-MHz parallel-plate discharge in chlorine at pressures of about 1 torr. This region is modeled as a volume-controlled plasma with the electron balance dominated by single-step electron...

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Veröffentlicht in:	IEEE transactions on plasma science 1986, Vol.14 (2), p.103-111
Hauptverfasser:	Rogoff, Gerald L., Kramer, Jerry M., Piejak, Robert B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Boltzmann equation Current measurement Density measurement Distribution functions Electric variables Electron mobility Ionization Plasma measurements Plasma properties Radio frequency
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