New Developments in Amorphous Silicon Based Microchannel Plates

Microchannel plates fabricated from hydrogenated amorphous silicon (AMCPs) are a promising alternative to conventional glass microchannel plates. Their main advantages lie in their flexible fabrication processes, allowing for adaptable channel shapes and the possibility of vertical integration with...

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Veröffentlicht in:	IEEE transactions on nuclear science 2023-09, Vol.70 (9), p.1-1
Hauptverfasser:	Frey, Samira, Antognini, Luca, Beygi, Mohammad, Ballif, Christophe, Wyrsch, Nicolas
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous Silicon Aspect ratio Deep Reactive Ion Etching Detectors Diameters Dynamic stability Fabrication Glass Mass spectrometry Mass spectroscopy Microchannel Plates Microchannels Monolithic Integration Particle Detection Photocathodes Plasma-enhanced Chemical Vapor Deposition Positron emission Positron emission tomography Pulse measurements Silicon Spatial resolution Technology Time Resolution Vacuum Detectors Voltage measurement
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