Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL)
We demonstrate the use of a facile nanopatterning scheme known as soft electron beam lithography (soft-eBL) to fabricate and site specifically position a variety of functional ceramic nanostructures onto two fragile substrates: a 75-nm-thick electron-transparent silicon nitride membrane and suspende...
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| Veröffentlicht in: | IEEE transactions on nanotechnology 2008-05, Vol.7 (3), p.338-343 |
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| container_title | IEEE transactions on nanotechnology |
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| creator | Donthu, S. Alem, N. Zixiao Pan Shu-You Li Shekhawat, G. Dravid, V. Benkstein, K.D. Semancik, S. |
| description | We demonstrate the use of a facile nanopatterning scheme known as soft electron beam lithography (soft-eBL) to fabricate and site specifically position a variety of functional ceramic nanostructures onto two fragile substrates: a 75-nm-thick electron-transparent silicon nitride membrane and suspended microhotplates with embedded heaters. The patterned nanostructures on nitride membranes can be readily probed with a variety of characterization tools without any postfabrication sample preparation, allowing observation of the nanostructures in near-pristine condition. We demonstrate this by characterizing the structural, chemical, and optical properties of several ceramic nanostructures patterned on membranes using electron microscopy and surface scanning probe tools such as atomic force microscopy and near- field scanning optical microscopy. We further demonstrate that such nanostructures, upon integration with microelectromechanical systems (MEMS) microhotplate platforms, can function as gas-sensing elements; we evaluate their sensing performance at micromoles per mole target analyte concentration levels. |
| doi_str_mv | 10.1109/TNANO.2008.917793 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_crossref_primary_10_1109_TNANO_2008_917793</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4444999</ieee_id><sourcerecordid>1671333011</sourcerecordid><originalsourceid>FETCH-LOGICAL-c355t-a6c8bdb0f0fc789cf8f66f23bdc65531ce9fc28de183526cd1854038398f9ea63</originalsourceid><addsrcrecordid>eNpdkUFr3DAQhU1poWmaH1B6MYVCcvBWI1mydEy23SSwbA5JIDchy6ONgtfaSvIh_75KNuTQucww75vHwKuqb0AWAET9utucb24WlBC5UNB1in2ojkC10JQN_1hmzkQDlD98rr6k9EQIdILLoyr_9hFtxqFemT56a7IPUx1cvcRodt7WGzOFlONs8xwx1UVcRbP1I9a3c18Ek8v2PvlpW98Glxsci10s2AWaXb32-TFso9k_Pten6VW_WJ99rT45MyY8eevH1f3qz93yqlnfXF4vz9eNZZznxggr-6EnjjjbSWWddEI4yvrBCs4ZWFTOUjkgSMapsANI3hImmZJOoRHsuDo9-O5j-Dtjynrnk8VxNBOGOWkQHTDGCEBBf_yHPoU5TuU7rYBSRTvKCwQHyMaQUkSn99HvTHzWQPRLDPo1Bv0Sgz7EUG5-vhmbZM3oopmsT--HlDAuW9EW7vuB84j4LrellFLsHzMkkXw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>912292725</pqid></control><display><type>article</type><title>Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL)</title><source>IEEE Electronic Library (IEL)</source><creator>Donthu, S. ; Alem, N. ; Zixiao Pan ; Shu-You Li ; Shekhawat, G. ; Dravid, V. ; Benkstein, K.D. ; Semancik, S.</creator><creatorcontrib>Donthu, S. ; Alem, N. ; Zixiao Pan ; Shu-You Li ; Shekhawat, G. ; Dravid, V. ; Benkstein, K.D. ; Semancik, S.</creatorcontrib><description>We demonstrate the use of a facile nanopatterning scheme known as soft electron beam lithography (soft-eBL) to fabricate and site specifically position a variety of functional ceramic nanostructures onto two fragile substrates: a 75-nm-thick electron-transparent silicon nitride membrane and suspended microhotplates with embedded heaters. The patterned nanostructures on nitride membranes can be readily probed with a variety of characterization tools without any postfabrication sample preparation, allowing observation of the nanostructures in near-pristine condition. We demonstrate this by characterizing the structural, chemical, and optical properties of several ceramic nanostructures patterned on membranes using electron microscopy and surface scanning probe tools such as atomic force microscopy and near- field scanning optical microscopy. We further demonstrate that such nanostructures, upon integration with microelectromechanical systems (MEMS) microhotplate platforms, can function as gas-sensing elements; we evaluate their sensing performance at micromoles per mole target analyte concentration levels.</description><identifier>ISSN: 1536-125X</identifier><identifier>EISSN: 1941-0085</identifier><identifier>DOI: 10.1109/TNANO.2008.917793</identifier><identifier>CODEN: ITNECU</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Atom optics ; Atomic force microscopy ; Biomembranes ; Ceramic nanopatterns ; Ceramics ; Electron beam lithography ; Electron optics ; Electronics ; Exact sciences and technology ; Fabrication ; gas sensors ; General equipment and techniques ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Lithography ; Membranes ; Micro- and nanoelectromechanical devices (mems/nems) ; Microelectromechanical systems ; Microelectronic fabrication (materials and surfaces technology) ; microhotplates ; Nanocomposites ; Nanomaterials ; Nanostructure ; Nanostructures ; nitride membranes ; Optical microscopy ; Physics ; Scanning electron microscopy ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing ; soft-electron beam lithography (soft-eBL)</subject><ispartof>IEEE transactions on nanotechnology, 2008-05, Vol.7 (3), p.338-343</ispartof><rights>2008 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2008</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c355t-a6c8bdb0f0fc789cf8f66f23bdc65531ce9fc28de183526cd1854038398f9ea63</citedby><cites>FETCH-LOGICAL-c355t-a6c8bdb0f0fc789cf8f66f23bdc65531ce9fc28de183526cd1854038398f9ea63</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4444999$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27922,27923,54756</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4444999$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=20358464$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Donthu, S.</creatorcontrib><creatorcontrib>Alem, N.</creatorcontrib><creatorcontrib>Zixiao Pan</creatorcontrib><creatorcontrib>Shu-You Li</creatorcontrib><creatorcontrib>Shekhawat, G.</creatorcontrib><creatorcontrib>Dravid, V.</creatorcontrib><creatorcontrib>Benkstein, K.D.</creatorcontrib><creatorcontrib>Semancik, S.</creatorcontrib><title>Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL)</title><title>IEEE transactions on nanotechnology</title><addtitle>TNANO</addtitle><description>We demonstrate the use of a facile nanopatterning scheme known as soft electron beam lithography (soft-eBL) to fabricate and site specifically position a variety of functional ceramic nanostructures onto two fragile substrates: a 75-nm-thick electron-transparent silicon nitride membrane and suspended microhotplates with embedded heaters. The patterned nanostructures on nitride membranes can be readily probed with a variety of characterization tools without any postfabrication sample preparation, allowing observation of the nanostructures in near-pristine condition. We demonstrate this by characterizing the structural, chemical, and optical properties of several ceramic nanostructures patterned on membranes using electron microscopy and surface scanning probe tools such as atomic force microscopy and near- field scanning optical microscopy. We further demonstrate that such nanostructures, upon integration with microelectromechanical systems (MEMS) microhotplate platforms, can function as gas-sensing elements; we evaluate their sensing performance at micromoles per mole target analyte concentration levels.</description><subject>Applied sciences</subject><subject>Atom optics</subject><subject>Atomic force microscopy</subject><subject>Biomembranes</subject><subject>Ceramic nanopatterns</subject><subject>Ceramics</subject><subject>Electron beam lithography</subject><subject>Electron optics</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fabrication</subject><subject>gas sensors</subject><subject>General equipment and techniques</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Lithography</subject><subject>Membranes</subject><subject>Micro- and nanoelectromechanical devices (mems/nems)</subject><subject>Microelectromechanical systems</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>microhotplates</subject><subject>Nanocomposites</subject><subject>Nanomaterials</subject><subject>Nanostructure</subject><subject>Nanostructures</subject><subject>nitride membranes</subject><subject>Optical microscopy</subject><subject>Physics</subject><subject>Scanning electron microscopy</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</subject><subject>soft-electron beam lithography (soft-eBL)</subject><issn>1536-125X</issn><issn>1941-0085</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkUFr3DAQhU1poWmaH1B6MYVCcvBWI1mydEy23SSwbA5JIDchy6ONgtfaSvIh_75KNuTQucww75vHwKuqb0AWAET9utucb24WlBC5UNB1in2ojkC10JQN_1hmzkQDlD98rr6k9EQIdILLoyr_9hFtxqFemT56a7IPUx1cvcRodt7WGzOFlONs8xwx1UVcRbP1I9a3c18Ek8v2PvlpW98Glxsci10s2AWaXb32-TFso9k_Pten6VW_WJ99rT45MyY8eevH1f3qz93yqlnfXF4vz9eNZZznxggr-6EnjjjbSWWddEI4yvrBCs4ZWFTOUjkgSMapsANI3hImmZJOoRHsuDo9-O5j-Dtjynrnk8VxNBOGOWkQHTDGCEBBf_yHPoU5TuU7rYBSRTvKCwQHyMaQUkSn99HvTHzWQPRLDPo1Bv0Sgz7EUG5-vhmbZM3oopmsT--HlDAuW9EW7vuB84j4LrellFLsHzMkkXw</recordid><startdate>20080501</startdate><enddate>20080501</enddate><creator>Donthu, S.</creator><creator>Alem, N.</creator><creator>Zixiao Pan</creator><creator>Shu-You Li</creator><creator>Shekhawat, G.</creator><creator>Dravid, V.</creator><creator>Benkstein, K.D.</creator><creator>Semancik, S.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>7QQ</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20080501</creationdate><title>Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL)</title><author>Donthu, S. ; Alem, N. ; Zixiao Pan ; Shu-You Li ; Shekhawat, G. ; Dravid, V. ; Benkstein, K.D. ; Semancik, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c355t-a6c8bdb0f0fc789cf8f66f23bdc65531ce9fc28de183526cd1854038398f9ea63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Applied sciences</topic><topic>Atom optics</topic><topic>Atomic force microscopy</topic><topic>Biomembranes</topic><topic>Ceramic nanopatterns</topic><topic>Ceramics</topic><topic>Electron beam lithography</topic><topic>Electron optics</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Fabrication</topic><topic>gas sensors</topic><topic>General equipment and techniques</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Lithography</topic><topic>Membranes</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>Microelectromechanical systems</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>microhotplates</topic><topic>Nanocomposites</topic><topic>Nanomaterials</topic><topic>Nanostructure</topic><topic>Nanostructures</topic><topic>nitride membranes</topic><topic>Optical microscopy</topic><topic>Physics</topic><topic>Scanning electron microscopy</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</topic><topic>soft-electron beam lithography (soft-eBL)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Donthu, S.</creatorcontrib><creatorcontrib>Alem, N.</creatorcontrib><creatorcontrib>Zixiao Pan</creatorcontrib><creatorcontrib>Shu-You Li</creatorcontrib><creatorcontrib>Shekhawat, G.</creatorcontrib><creatorcontrib>Dravid, V.</creatorcontrib><creatorcontrib>Benkstein, K.D.</creatorcontrib><creatorcontrib>Semancik, S.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Ceramic Abstracts</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on nanotechnology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Donthu, S.</au><au>Alem, N.</au><au>Zixiao Pan</au><au>Shu-You Li</au><au>Shekhawat, G.</au><au>Dravid, V.</au><au>Benkstein, K.D.</au><au>Semancik, S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL)</atitle><jtitle>IEEE transactions on nanotechnology</jtitle><stitle>TNANO</stitle><date>2008-05-01</date><risdate>2008</risdate><volume>7</volume><issue>3</issue><spage>338</spage><epage>343</epage><pages>338-343</pages><issn>1536-125X</issn><eissn>1941-0085</eissn><coden>ITNECU</coden><abstract>We demonstrate the use of a facile nanopatterning scheme known as soft electron beam lithography (soft-eBL) to fabricate and site specifically position a variety of functional ceramic nanostructures onto two fragile substrates: a 75-nm-thick electron-transparent silicon nitride membrane and suspended microhotplates with embedded heaters. The patterned nanostructures on nitride membranes can be readily probed with a variety of characterization tools without any postfabrication sample preparation, allowing observation of the nanostructures in near-pristine condition. We demonstrate this by characterizing the structural, chemical, and optical properties of several ceramic nanostructures patterned on membranes using electron microscopy and surface scanning probe tools such as atomic force microscopy and near- field scanning optical microscopy. We further demonstrate that such nanostructures, upon integration with microelectromechanical systems (MEMS) microhotplate platforms, can function as gas-sensing elements; we evaluate their sensing performance at micromoles per mole target analyte concentration levels.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TNANO.2008.917793</doi><tpages>6</tpages></addata></record> |
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| subjects | Applied sciences Atom optics Atomic force microscopy Biomembranes Ceramic nanopatterns Ceramics Electron beam lithography Electron optics Electronics Exact sciences and technology Fabrication gas sensors General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Lithography Membranes Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical systems Microelectronic fabrication (materials and surfaces technology) microhotplates Nanocomposites Nanomaterials Nanostructure Nanostructures nitride membranes Optical microscopy Physics Scanning electron microscopy Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing soft-electron beam lithography (soft-eBL) |
| title | Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL) |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-13T15%3A36%3A15IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Directed%20Fabrication%20of%20Ceramic%20Nanostructures%20on%20Fragile%20Substrates%20Using%20Soft-electron%20Beam%20Lithography%20(soft-eBL)&rft.jtitle=IEEE%20transactions%20on%20nanotechnology&rft.au=Donthu,%20S.&rft.date=2008-05-01&rft.volume=7&rft.issue=3&rft.spage=338&rft.epage=343&rft.pages=338-343&rft.issn=1536-125X&rft.eissn=1941-0085&rft.coden=ITNECU&rft_id=info:doi/10.1109/TNANO.2008.917793&rft_dat=%3Cproquest_RIE%3E1671333011%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=912292725&rft_id=info:pmid/&rft_ieee_id=4444999&rfr_iscdi=true |