A Tunable Micromachined Multithreshold Inertial Switch

In this article, we present a multithreshold microelectromechanical tunable inertial switch. The device aims to provide quantitative information on acceleration while retaining the attractive energy-saving features of binary threshold switches. The designed proof-of-concept device with three thresho...

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Veröffentlicht in:	IEEE/ASME transactions on mechatronics 2024-04, Vol.29 (2), p.1546-1555
Hauptverfasser:	Xu, Qiu, Alahmdi, Raed, Wang, Lvjun, Rocha, Rodrigo T., Younis, Mohammad I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electrodes Electrostatics Force Head injuries Impact Iron microelectromechanical systems (MEMS) inertial sensor Micromachining Micromechanical devices multiple threshold accelerations shock Switches Threshold voltage tunability
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