Understanding the Detection Limits of a Vertically Packed Anisotropic Magnetoresistive Sensor System

In this work we study the integration of Anisotropic Magnetoresistive (AMR) sensors in large arrays using a vertically packed architecture aiming at understanding the feasibility of increasing the sensor volume at a minimal footprint. The AMR elements were measured individually at different packing...

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Veröffentlicht in:	IEEE transactions on magnetics 2025-01, p.1-1
Hauptverfasser:	Brites, Guilherme, Fernandes, Tiago P., Araujo, Pedro D. R., Macedo, Rita, Cardoso, Susana
Format:	Artikel
Sprache:	eng
Schlagworte:	Anisotropic magnetoresistance Couplings Detectivity Magnetic field measurement Magnetic multilayers Magnetic Sensor Microfabrication Noise Perpendicular magnetic anisotropy Rough surfaces Saturation magnetization Small footprint Surface roughness Surface topography
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