A Normal-Stressed Electromagnetic-Driven Stiffness-Tunable Nanopositioner

High-bandwidth and long-range nanoprecision motion is crucially required by many advanced instruments and robotic systems, which rely on the nanopositioners. However, traditional nanopositioners suffer from their fixed stiffness and can only obtain fixed performance, leading to narrow applications....

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on industrial electronics (1982) 2024-11, Vol.71 (11), p.15130-15139
Hauptverfasser:	Wang, Xiangyuan, Li, Linlin, Meng, Yixuan, Tan, Lingwen, Huang, Wei-Wei, Zhu, Zhiwei, Jiao, Fang, Zhu, LiMin
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Atomic force microscopy (AFM) compliant mechanism Effectiveness electromagnetic actuator Electromagnetics Force Manufacturing processes Nanopositioning Springs Stiffness tunable stiffness Tuning
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!