A Centimeter-Level 2-D Cross Micro Tensor Used Uniaxial MEMS Fluxgate Chip for Portable Magnetic Detection
In recent years, fluxgate tensor has made several attempts in geological exploration and magnetic target detection. A double-layer 2-D MEMS miniaturization fluxgate tensor is first proposed in this article. From 3-D to 2-D, the micro tensor has a novel measurement theory. The micro tensor consists o...
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| Veröffentlicht in: | IEEE transactions on electron devices 2024-01, Vol.71 (1), p.944-948 |
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| creator | Ma, Quankun Liu, Jianing Wu, Tao Chen, Huan Sun, Xuecheng Lei, Chong |
| description | In recent years, fluxgate tensor has made several attempts in geological exploration and magnetic target detection. A double-layer 2-D MEMS miniaturization fluxgate tensor is first proposed in this article. From 3-D to 2-D, the micro tensor has a novel measurement theory. The micro tensor consists of 16 fluxgate chips array with cross architecture, which is fabricated combining independent single chips, PCB technology, and bonding technology. Sensitivity of all chips is about 1780 V/T with error of less than 5%, and noise power spectrum density is lower than 50 pT /{\surd } Hz at 1 Hz. The overall size of the micro tensor is about 5\times 5\times1 cm, which is the smallest fluxgate tensor at present. An olive-shaped permanent magnet is detected by the micro tensor. The shape and position of permanent magnet can be clearly seen from the tensor results. |
| doi_str_mv | 10.1109/TED.2023.3338195 |
| format | Article |
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A double-layer 2-D MEMS miniaturization fluxgate tensor is first proposed in this article. From 3-D to 2-D, the micro tensor has a novel measurement theory. The micro tensor consists of 16 fluxgate chips array with cross architecture, which is fabricated combining independent single chips, PCB technology, and bonding technology. Sensitivity of all chips is about 1780 V/T with error of less than 5%, and noise power spectrum density is lower than 50 pT<inline-formula> <tex-math notation="LaTeX">/{\surd } </tex-math></inline-formula>Hz at 1 Hz. The overall size of the micro tensor is about <inline-formula> <tex-math notation="LaTeX">5\times 5\times1 </tex-math></inline-formula> cm, which is the smallest fluxgate tensor at present. An olive-shaped permanent magnet is detected by the micro tensor. The shape and position of permanent magnet can be clearly seen from the tensor results.]]></description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2023.3338195</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Coils ; Fluxgate magnetometers ; Fluxgate sensor ; Magnetic field measurement ; Magnetic noise ; magnetic tensor ; Mathematical analysis ; MEMS technology ; Metal-metal bonding ; Micromechanical devices ; Permanent magnets ; Sensitivity ; Superconducting magnets ; Target detection ; Tensors</subject><ispartof>IEEE transactions on electron devices, 2024-01, Vol.71 (1), p.944-948</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. 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A double-layer 2-D MEMS miniaturization fluxgate tensor is first proposed in this article. From 3-D to 2-D, the micro tensor has a novel measurement theory. The micro tensor consists of 16 fluxgate chips array with cross architecture, which is fabricated combining independent single chips, PCB technology, and bonding technology. Sensitivity of all chips is about 1780 V/T with error of less than 5%, and noise power spectrum density is lower than 50 pT<inline-formula> <tex-math notation="LaTeX">/{\surd } </tex-math></inline-formula>Hz at 1 Hz. The overall size of the micro tensor is about <inline-formula> <tex-math notation="LaTeX">5\times 5\times1 </tex-math></inline-formula> cm, which is the smallest fluxgate tensor at present. An olive-shaped permanent magnet is detected by the micro tensor. The shape and position of permanent magnet can be clearly seen from the tensor results.]]></description><subject>Coils</subject><subject>Fluxgate magnetometers</subject><subject>Fluxgate sensor</subject><subject>Magnetic field measurement</subject><subject>Magnetic noise</subject><subject>magnetic tensor</subject><subject>Mathematical analysis</subject><subject>MEMS technology</subject><subject>Metal-metal bonding</subject><subject>Micromechanical devices</subject><subject>Permanent magnets</subject><subject>Sensitivity</subject><subject>Superconducting magnets</subject><subject>Target detection</subject><subject>Tensors</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpNkE1Lw0AQhhdRsFbvHjwseE7dz2RzlLRVoUHB9rxsNpO6JU3q7lbqvzelPXgaBp73HeZB6J6SCaUkf1rOphNGGJ9wzhXN5QUaUSmzJE9FeolGhFCV5Fzxa3QTwmZYUyHYCG2ecQFddFuI4JMF_ECLWTLFhe9DwKWzvsdL6ELv8SpAjVedMwdnWlzOyk88b_eHtYmAiy-3w80AffQ-mqoFXJp1B9FZPB2abXR9d4uuGtMGuDvPMVrNZ8viNVm8v7wVz4vEMiFjwiBTDGSVMpPVpq45WNZQwkEKaaVpqDCMA68qa1RWS05lnROwoBRYm7KGj9HjqXfn--89hKg3_d53w0nNckpFJpXiA0VOlD1-6qHRO--2xv9qSvTRqB6M6qNRfTY6RB5OEQcA_3Auc54K_gctVXG0</recordid><startdate>202401</startdate><enddate>202401</enddate><creator>Ma, Quankun</creator><creator>Liu, Jianing</creator><creator>Wu, Tao</creator><creator>Chen, Huan</creator><creator>Sun, Xuecheng</creator><creator>Lei, Chong</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| subjects | Coils Fluxgate magnetometers Fluxgate sensor Magnetic field measurement Magnetic noise magnetic tensor Mathematical analysis MEMS technology Metal-metal bonding Micromechanical devices Permanent magnets Sensitivity Superconducting magnets Target detection Tensors |
| title | A Centimeter-Level 2-D Cross Micro Tensor Used Uniaxial MEMS Fluxgate Chip for Portable Magnetic Detection |
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