A Highly Sensitive Flexible Pressure Sensor Based on Inter-Comb Structured Graphene Electrodes
Susceptible and flexible pressure sensors have broad application prospects and market demands in bionic skin, human-machine interface, and intelligent wearable electronic devices. However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge....
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| Veröffentlicht in: | IEEE transactions on electron devices 2023-04, Vol.70 (4), p.1-6 |
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| container_title | IEEE transactions on electron devices |
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| creator | Lu, Shilin Nie, Tianchun Li, Yang Li, Yuanyue Yao, Zhao Kim, Nam Young Li, Shandong |
| description | Susceptible and flexible pressure sensors have broad application prospects and market demands in bionic skin, human-machine interface, and intelligent wearable electronic devices. However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa ^{-\text{1}} at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit ( \sim 12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the 6 \times 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors. |
| doi_str_mv | 10.1109/TED.2023.3248000 |
| format | Article |
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However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa<inline-formula> <tex-math notation="LaTeX">^{-\text{1}}</tex-math> </inline-formula> at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit (<inline-formula> <tex-math notation="LaTeX">\sim</tex-math> </inline-formula>12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the 6 <inline-formula> <tex-math notation="LaTeX">\times</tex-math> </inline-formula> 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.]]></description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2023.3248000</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Bionics ; Capacitance ; Capacitive pressure sensors ; Carotid arteries ; Electrodes ; Electronic devices ; Graphene ; graphene electrodes ; high sensitivity ; inter-comb structure ; laser scribe ; Nanofibers ; Pressure distribution ; Pressure sensors ; Recovery time ; Respiratory diseases ; Sensitivity ; Sensor arrays ; Sensors ; Temperature sensors</subject><ispartof>IEEE transactions on electron devices, 2023-04, Vol.70 (4), p.1-6</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. 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However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa<inline-formula> <tex-math notation="LaTeX">^{-\text{1}}</tex-math> </inline-formula> at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit (<inline-formula> <tex-math notation="LaTeX">\sim</tex-math> </inline-formula>12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the 6 <inline-formula> <tex-math notation="LaTeX">\times</tex-math> </inline-formula> 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.]]></description><subject>Bionics</subject><subject>Capacitance</subject><subject>Capacitive pressure sensors</subject><subject>Carotid arteries</subject><subject>Electrodes</subject><subject>Electronic devices</subject><subject>Graphene</subject><subject>graphene electrodes</subject><subject>high sensitivity</subject><subject>inter-comb structure</subject><subject>laser scribe</subject><subject>Nanofibers</subject><subject>Pressure distribution</subject><subject>Pressure sensors</subject><subject>Recovery time</subject><subject>Respiratory diseases</subject><subject>Sensitivity</subject><subject>Sensor arrays</subject><subject>Sensors</subject><subject>Temperature sensors</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpNkD1PwzAQhi0EEqWwMzBYYk4524kTj6WkH1IlkFpWrMS50FRpUuwE0X-PSzswnV7dcx96CLlnMGIM1NM6fRlx4GIkeJgAwAUZsCiKAyVDeUkGACwJlEjENblxbuujDEM-IB9jOq8-N_WBrrBxVVd9I53W-FPlNdI3i871Fv96raXPmcOCtg1dNB3aYNLucrrqbG86DxV0ZrP9BhukaY2ms22B7pZclVnt8O5ch-R9mq4n82D5OltMxsvAcMW7wIAplCjU8VlRxEJAlEOMUjKTlAykSaQshcnzEGMDjKNgWZhnGTChZOzjkDye9u5t-9Wj6_S27W3jT2oeK4_JRIGn4EQZ2zpnsdR7W-0ye9AM9NGi9hb10aI-W_QjD6eRChH_4RCFEYvFL89VbTI</recordid><startdate>20230401</startdate><enddate>20230401</enddate><creator>Lu, Shilin</creator><creator>Nie, Tianchun</creator><creator>Li, Yang</creator><creator>Li, Yuanyue</creator><creator>Yao, Zhao</creator><creator>Kim, Nam Young</creator><creator>Li, Shandong</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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However, optimizing the sensor's sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa<inline-formula> <tex-math notation="LaTeX">^{-\text{1}}</tex-math> </inline-formula> at 0-2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit (<inline-formula> <tex-math notation="LaTeX">\sim</tex-math> </inline-formula>12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. 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| subjects | Bionics Capacitance Capacitive pressure sensors Carotid arteries Electrodes Electronic devices Graphene graphene electrodes high sensitivity inter-comb structure laser scribe Nanofibers Pressure distribution Pressure sensors Recovery time Respiratory diseases Sensitivity Sensor arrays Sensors Temperature sensors |
| title | A Highly Sensitive Flexible Pressure Sensor Based on Inter-Comb Structured Graphene Electrodes |
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