Analytical Design and Experimental Verification of Lateral Superjunction Based on Global Region Normalization Method

The global region normalization (GRN) method is proposed to optimize the lateral superjunction (SJ), in this article. The GRN features normalizations in the global doping range of the SJ from zero to the maximum doping concentration {N}_{\text {max}} that was theoretically determined by the pillar...

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Veröffentlicht in:	IEEE transactions on electron devices 2021-05, Vol.68 (5), p.2372-2377
Hauptverfasser:	Zhang, Wentong, Yang, Kun, Zhu, Xuhan, Zhang, Sen, He, Boyong, Wang, Zhuo, Qiao, Ming, Li, Zhaoji, Zhang, Bo
Format:	Artikel
Sprache:	eng
Schlagworte:	Breakdown voltage V B Design optimization Doping Electric potential experiments Mathematical model Micrometers normalization method Optimization Resistance sp specific on-resistance R on Substrates superjunction (SJ) Voltage Voltage measurement
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