Facts and Myths of Dielectric Breakdown Processes-Part II: Post-Breakdown and Variability

Device dimension scaling and process complexity have revealed new phenomena such as post-breakdown (BD) and variability issues in advanced technology nodes. Coupling of the first BD phenomena and their methodologies discussed in part I with the development of post-BD methodologies allows engineers t...

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Veröffentlicht in:	IEEE transactions on electron devices 2019-11, Vol.66 (11), p.4535-4545
1. Verfasser:	Wu, Ernest Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Circuit failure clustering model Current measurement Dielectric breakdown Dielectrics Electric breakdown hard breakdown (HBD) Integrated circuit modeling non-Poisson area scaling nonuniformity post-breakdown (BD) product failure progressive breakdown (PBD) Reliability soft breakdown (SBD) Statistical models time-dependent dielectric breakdown (TDDB) Transient analysis variability variation Voltage measurement
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