RF Small- and Large-Signal Characteristics of CPW and TFMS Lines on Trap-Rich HR-SOI Substrates

The main objective of this paper is to evaluate RF losses and nonlinear behavior of coplanar wave- guide (CPW) and thin-film microstrip (TFMS) lines from room temperature up to 175 °C fabricated on two different types of high resistivity (HR) silicon-on-insulator (SOI) substrates. One standard high-...

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Veröffentlicht in:	IEEE transactions on electron devices 2018-08, Vol.65 (8), p.3120-3126
Hauptverfasser:	Kazemi Esfeh, Babak, Rack, Martin, Ben Ali, Khaled, Allibert, Frederic, Raskin, Jean-Pierre
Format:	Artikel
Sprache:	eng
Schlagworte:	Conductors Coplanar waveguide (CPW) transmission lines Coplanar waveguides Electrical resistivity Harmonic distortion Linearity Loss measurement Metals Microstrip Radio frequency Silicon substrates silicon-on-insulator (SOI) technology SOI (semiconductors) stacked CPW lines Substrates Thin films thin-film microstrip (TFMS) Transmission lines trap-rich (TR) high resistivity (HR) SOI substrate
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