Photo-Induced Coplanar Waveguide RF Switch and Optical Crosstalk on High-Resistivity Silicon Trap-Rich Passivated Substrate

A continuous-wave mode optically controlled coplanar waveguide radio frequency (RF) switch on high-resistivity silicon substrate with and without trap-rich polysilicon (poly-Si) layer is investigated. Because of the local poly-Si trap-rich layer, we experimentally show the important reduction of opt...

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