Flexible Hotspot Detection Based on Fully Convolutional Network With Transfer Learning

Layout hotspot detection is one of the most important issues for the reliability enhancement of integrated circuits. Machine learning-based hotspot detectors have shown their advantages of efficiency and generalization compared with computationally intensive lithography process simulation. However,...

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Veröffentlicht in:	IEEE transactions on computer-aided design of integrated circuits and systems 2022-11, Vol.41 (11), p.4626-4638
Hauptverfasser:	Gai, Tianyang, Qu, Tong, Wang, Shuhan, Su, Xiaojing, Xu, Renren, Wang, Yun, Xue, Jing, Su, Yajuan, Wei, Yayi, Ye, Tianchun
Format:	Artikel
Sprache:	eng
Schlagworte:	Circuit reliability Deep learning Detectors Feature extraction hotspot detection Integrated circuit modeling Integrated circuits Layout Layouts lithography Machine learning Object detection Sensors Training Transfer learning
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