Unbalanced magnetron sputter deposition of biaxially aligned yttria stabilized zirconia and indium tin oxide thin films

Developing a fast and flexible deposition process for biaxially aligned buffer layers on polycrystalline or amorphous substrates is still an important step toward the development of a scalable process for REBa/sub 2/Cu/sub 3/O/sub 7-x/ (REBCO, RE(RareEarth) = Y, Nd,...) coated conductor. Biaxially a...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2003-06, Vol.13 (2), p.2567-2570
Hauptverfasser:	De Winter, G., Mahieu, S., De Roeck, I., De Gryse, R., Denul, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous magnetic materials Amorphous materials Applied sciences Buffer layers Conducting materials Electronics Exact sciences and technology Indium tin oxide Indium tin oxides Lattices Magnetic materials Microelectronic fabrication (materials and surfaces technology) Neodymium Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solar energy Sputtering Thermal conductivity Thin films
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