Micro-materials processing

In the years since its discovery and early development in the 1960's, the laser has found increasing acceptance as a production tool. Its unique features, Which allow for the rapid delivery of precisely controlled amounts of energy with high spatial accuracy to a work surface, have made it the...

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Bibliographische Detailangaben

Veröffentlicht in:	Proceedings of the IEEE 1982-01, Vol.70 (6), p.545-555
Hauptverfasser:	Cohen, M.G., Kaplan, R.A., Arthurs, E.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electronics industry Industrial electronics Instruments Laser theory Microscopy Optical materials Production Semiconductor lasers Semiconductor materials Very large scale integration
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