Applications of scanning electron microscopy to thin film studies on semiconductor devices

Some of the various uses of the scanning electron microscope (SEM) as applied to thin film studies on semiconductor devices are illustrated. Examples presented include the use of the SEM to measure thickness variations in an aluminum film, to determine evaporation coverage of aluminum films over oxi...

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Veröffentlicht in:	Proceedings of the IEEE 1971-10, Vol.59 (10), p.1429-1433
Hauptverfasser:	Gonzales, A.J., Philofsky, E.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Particle measurements Phase measurement Scanning electron microscopy Semiconductor devices Semiconductor films Semiconductor thin films Thickness measurement Thin film circuits Thin film devices
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