Wafer-Level Monolithic Integration of Vertical Micro-LEDs on Glass
In an earlier study micro-LED micro display (
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| Veröffentlicht in: | IEEE photonics technology letters 2020-06, Vol.32 (12), p.673-676 |
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| container_end_page | 676 |
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| container_issue | 12 |
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| container_title | IEEE photonics technology letters |
| container_volume | 32 |
| creator | Guo, Wei Meng, Hu Chen, Youru Sun, Tuo Li, Yanzhao |
| description | In an earlier study micro-LED micro display ( |
| doi_str_mv | 10.1109/LPT.2020.2991672 |
| format | Article |
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Here we report the feasibility of wafer-level monolithic integration of micro-LEDs on glass substrate/backplane. Such issues as the cracking of GaN epitaxial layer, the deviation of alignment, and the peeling of insulator are discussed. SU-8 is proposed as the insulator material in vertical micro-LEDs, resulting into improved light extraction efficiency and allowing for the reduced light crosstalk between sub pixels if the integrated reflective mirrors are used. A directly driven micro-LED parallel array with a resolution of 320 × 720 with individual LED size ranging from 5 μm to 28 μm is demonstrated. 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It is believed that this monolithic technology on glass will play an important role in future high performance and low cost wearable and/or phone displays.</description><subject>Artificial neural networks</subject><subject>Banking</subject><subject>Economic indicators</subject><subject>glass backplane</subject><subject>Heuristic algorithms</subject><subject>Light emitting diodes</subject><subject>light extraction</subject><subject>Mathematical model</subject><subject>Micro-LED</subject><subject>Sun</subject><subject>wafer bonding</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kM1LAzEQxYMoWKt3wcuC510nH7tJjlprLazooeoxpOmsblk3NdkK_vemtHiaB_N7M49HyCWFglLQN_XLomDAoGBa00qyIzKiWtAcqBTHSUPSlPLylJzFuAagouRiRO7ebYMhr_EHu-zJ975rh8_WZfN-wI9gh9b3mW-yNwxD62xCWhd8Xk_vY5Y2s87GeE5OGttFvDjMMXl9mC4mj3n9PJtPbuvcMU2HXPIUQTixBOVQVNKtUkpWMrBYKioqsHJVOmwqqThw5ZzE5VIqiVapRAs-Jtf7u5vgv7cYB7P229Cnl4YJYEILpmWiYE-lnDEGbMwmtF82_BoKZteUSU2ZXVPm0FSyXO0tLSL-4xqUSDz_A3P0Ykg</recordid><startdate>20200615</startdate><enddate>20200615</enddate><creator>Guo, Wei</creator><creator>Meng, Hu</creator><creator>Chen, Youru</creator><creator>Sun, Tuo</creator><creator>Li, Yanzhao</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| source | IEEE Electronic Library (IEL) |
| subjects | Artificial neural networks Banking Economic indicators glass backplane Heuristic algorithms Light emitting diodes light extraction Mathematical model Micro-LED Sun wafer bonding |
| title | Wafer-Level Monolithic Integration of Vertical Micro-LEDs on Glass |
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