Design and Feasibility Evaluation of WGPs Chip as a Physical Force Sensor

Wire grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance brightness and improve the utilization rate of the backlight source. This letter proposes a new design of a WGPs chip, which can be used in a physical force...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE photonics technology letters 2017-03, Vol.29 (6), p.481-484
Hauptverfasser: Tseng, Kuo-Chun, Hong, Shuo-Ting, Fu, Chien-Chung
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 484
container_issue 6
container_start_page 481
container_title IEEE photonics technology letters
container_volume 29
creator Tseng, Kuo-Chun
Hong, Shuo-Ting
Fu, Chien-Chung
description Wire grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance brightness and improve the utilization rate of the backlight source. This letter proposes a new design of a WGPs chip, which can be used in a physical force sensor. In this way, the WGPs can fabricate on many types of microstructure, such as cantilever beam, thin film, and bridge. Then, infrared light was served as the signal source, and illuminated WGPs chip with the optimum angle. When a physical force is applied to the microstructure, the incident angle of infrared light will be varied, resulting in different transmission signal output. As a result, this system can be used for designing the physical force-measuring module operated by optical contactless sensing approach. Furthermore, the WGPs structure introduced in this letter was defined by laser interference lithography and deposited Al by E-beam evaporation.
doi_str_mv 10.1109/LPT.2016.2637910
format Article
fullrecord <record><control><sourceid>crossref_RIE</sourceid><recordid>TN_cdi_crossref_primary_10_1109_LPT_2016_2637910</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>7779105</ieee_id><sourcerecordid>10_1109_LPT_2016_2637910</sourcerecordid><originalsourceid>FETCH-LOGICAL-c216t-54130f3a0119105eb445e78fc254d79c4c3b78a49eee5ea46853a367b92580e43</originalsourceid><addsrcrecordid>eNo9kEFLw0AQhRdRsFbvgpf9A6kz2d1scpTY1kLAghWPYbKd2JWYlGwV-u9NaPH0Hrx5j-ET4h5hhgjZY7HezGLAZBYnymYIF2KCmcYI0OrLwcPgEZW5FjchfAGgNkpPxOqZg_9sJbVbuWAKvvKNPxzl_JeaHzr4rpVdLT-W6yDznd9LCpLkencM3lEjF13vWL5xG7r-VlzV1AS-O-tUvC_mm_wlKl6Xq_ypiFyMySEyGhXUigBx-NJwpbVhm9YuNnprM6edqmxKOmNmw6ST1ChSia2y2KTAWk0FnHZd34XQc13ue_9N_bFEKEcU5YCiHFGUZxRD5eFU8cPo_7m1Y2jUH-0-WJE</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Design and Feasibility Evaluation of WGPs Chip as a Physical Force Sensor</title><source>IEEE Electronic Library (IEL)</source><creator>Tseng, Kuo-Chun ; Hong, Shuo-Ting ; Fu, Chien-Chung</creator><creatorcontrib>Tseng, Kuo-Chun ; Hong, Shuo-Ting ; Fu, Chien-Chung</creatorcontrib><description>Wire grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance brightness and improve the utilization rate of the backlight source. This letter proposes a new design of a WGPs chip, which can be used in a physical force sensor. In this way, the WGPs can fabricate on many types of microstructure, such as cantilever beam, thin film, and bridge. Then, infrared light was served as the signal source, and illuminated WGPs chip with the optimum angle. When a physical force is applied to the microstructure, the incident angle of infrared light will be varied, resulting in different transmission signal output. As a result, this system can be used for designing the physical force-measuring module operated by optical contactless sensing approach. Furthermore, the WGPs structure introduced in this letter was defined by laser interference lithography and deposited Al by E-beam evaporation.</description><identifier>ISSN: 1041-1135</identifier><identifier>EISSN: 1941-0174</identifier><identifier>DOI: 10.1109/LPT.2016.2637910</identifier><identifier>CODEN: IPTLEL</identifier><language>eng</language><publisher>IEEE</publisher><subject>Erbium ; Force ; Gratings ; infrared light ; laser interference lithography ; optical contactless sensing ; Optical device fabrication ; Optical polarization ; Optical sensors ; Optical variables measurement ; physical force sensor ; Wire grid polarizers</subject><ispartof>IEEE photonics technology letters, 2017-03, Vol.29 (6), p.481-484</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c216t-54130f3a0119105eb445e78fc254d79c4c3b78a49eee5ea46853a367b92580e43</cites><orcidid>0000-0002-0032-5513</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7779105$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7779105$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Tseng, Kuo-Chun</creatorcontrib><creatorcontrib>Hong, Shuo-Ting</creatorcontrib><creatorcontrib>Fu, Chien-Chung</creatorcontrib><title>Design and Feasibility Evaluation of WGPs Chip as a Physical Force Sensor</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description>Wire grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance brightness and improve the utilization rate of the backlight source. This letter proposes a new design of a WGPs chip, which can be used in a physical force sensor. In this way, the WGPs can fabricate on many types of microstructure, such as cantilever beam, thin film, and bridge. Then, infrared light was served as the signal source, and illuminated WGPs chip with the optimum angle. When a physical force is applied to the microstructure, the incident angle of infrared light will be varied, resulting in different transmission signal output. As a result, this system can be used for designing the physical force-measuring module operated by optical contactless sensing approach. Furthermore, the WGPs structure introduced in this letter was defined by laser interference lithography and deposited Al by E-beam evaporation.</description><subject>Erbium</subject><subject>Force</subject><subject>Gratings</subject><subject>infrared light</subject><subject>laser interference lithography</subject><subject>optical contactless sensing</subject><subject>Optical device fabrication</subject><subject>Optical polarization</subject><subject>Optical sensors</subject><subject>Optical variables measurement</subject><subject>physical force sensor</subject><subject>Wire grid polarizers</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kEFLw0AQhRdRsFbvgpf9A6kz2d1scpTY1kLAghWPYbKd2JWYlGwV-u9NaPH0Hrx5j-ET4h5hhgjZY7HezGLAZBYnymYIF2KCmcYI0OrLwcPgEZW5FjchfAGgNkpPxOqZg_9sJbVbuWAKvvKNPxzl_JeaHzr4rpVdLT-W6yDznd9LCpLkencM3lEjF13vWL5xG7r-VlzV1AS-O-tUvC_mm_wlKl6Xq_ypiFyMySEyGhXUigBx-NJwpbVhm9YuNnprM6edqmxKOmNmw6ST1ChSia2y2KTAWk0FnHZd34XQc13ue_9N_bFEKEcU5YCiHFGUZxRD5eFU8cPo_7m1Y2jUH-0-WJE</recordid><startdate>20170315</startdate><enddate>20170315</enddate><creator>Tseng, Kuo-Chun</creator><creator>Hong, Shuo-Ting</creator><creator>Fu, Chien-Chung</creator><general>IEEE</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0002-0032-5513</orcidid></search><sort><creationdate>20170315</creationdate><title>Design and Feasibility Evaluation of WGPs Chip as a Physical Force Sensor</title><author>Tseng, Kuo-Chun ; Hong, Shuo-Ting ; Fu, Chien-Chung</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c216t-54130f3a0119105eb445e78fc254d79c4c3b78a49eee5ea46853a367b92580e43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Erbium</topic><topic>Force</topic><topic>Gratings</topic><topic>infrared light</topic><topic>laser interference lithography</topic><topic>optical contactless sensing</topic><topic>Optical device fabrication</topic><topic>Optical polarization</topic><topic>Optical sensors</topic><topic>Optical variables measurement</topic><topic>physical force sensor</topic><topic>Wire grid polarizers</topic><toplevel>online_resources</toplevel><creatorcontrib>Tseng, Kuo-Chun</creatorcontrib><creatorcontrib>Hong, Shuo-Ting</creatorcontrib><creatorcontrib>Fu, Chien-Chung</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><jtitle>IEEE photonics technology letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Tseng, Kuo-Chun</au><au>Hong, Shuo-Ting</au><au>Fu, Chien-Chung</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Design and Feasibility Evaluation of WGPs Chip as a Physical Force Sensor</atitle><jtitle>IEEE photonics technology letters</jtitle><stitle>LPT</stitle><date>2017-03-15</date><risdate>2017</risdate><volume>29</volume><issue>6</issue><spage>481</spage><epage>484</epage><pages>481-484</pages><issn>1041-1135</issn><eissn>1941-0174</eissn><coden>IPTLEL</coden><abstract>Wire grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance brightness and improve the utilization rate of the backlight source. This letter proposes a new design of a WGPs chip, which can be used in a physical force sensor. In this way, the WGPs can fabricate on many types of microstructure, such as cantilever beam, thin film, and bridge. Then, infrared light was served as the signal source, and illuminated WGPs chip with the optimum angle. When a physical force is applied to the microstructure, the incident angle of infrared light will be varied, resulting in different transmission signal output. As a result, this system can be used for designing the physical force-measuring module operated by optical contactless sensing approach. Furthermore, the WGPs structure introduced in this letter was defined by laser interference lithography and deposited Al by E-beam evaporation.</abstract><pub>IEEE</pub><doi>10.1109/LPT.2016.2637910</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0002-0032-5513</orcidid></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 1041-1135
ispartof IEEE photonics technology letters, 2017-03, Vol.29 (6), p.481-484
issn 1041-1135
1941-0174
language eng
recordid cdi_crossref_primary_10_1109_LPT_2016_2637910
source IEEE Electronic Library (IEL)
subjects Erbium
Force
Gratings
infrared light
laser interference lithography
optical contactless sensing
Optical device fabrication
Optical polarization
Optical sensors
Optical variables measurement
physical force sensor
Wire grid polarizers
title Design and Feasibility Evaluation of WGPs Chip as a Physical Force Sensor
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-04T07%3A01%3A15IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Design%20and%20Feasibility%20Evaluation%20of%20WGPs%20Chip%20as%20a%20Physical%20Force%20Sensor&rft.jtitle=IEEE%20photonics%20technology%20letters&rft.au=Tseng,%20Kuo-Chun&rft.date=2017-03-15&rft.volume=29&rft.issue=6&rft.spage=481&rft.epage=484&rft.pages=481-484&rft.issn=1041-1135&rft.eissn=1941-0174&rft.coden=IPTLEL&rft_id=info:doi/10.1109/LPT.2016.2637910&rft_dat=%3Ccrossref_RIE%3E10_1109_LPT_2016_2637910%3C/crossref_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=7779105&rfr_iscdi=true