Nanomechanically Tunable Photonic Crystal Resonators Utilizing Triple-Beam Coupled Nanocavities

We present our results on the design, fabrication, and characterization of a tunable photonic crystal (PhC) resonator through utilization of triple-beam coupled nanocavities driven by an on-chip integrated nanomechanical system. Our experiments demonstrated that we are able to achieve up to 24-nm sp...

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Veröffentlicht in:	IEEE photonics technology letters 2011-09, Vol.23 (18), p.1310-1312
Hauptverfasser:	Chew, Xiongyeu, Zhou, Guangya, Chau, Fook Siong, Deng, Jie
Format:	Artikel
Sprache:	eng
Schlagworte:	Cavity resonators Couplings Dielectrics Finite difference methods Integrated optics microelectromechanical systems (MEMS) Optical waveguides Photonic crystals photonic crystals (PhCs) photonic wires (PhWs) silicon-on-insulator (SOI) Tuning
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