Multilayered MOEMS Tunable Spectrometer for Fluorescence Lifetime Detection

Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded desi...

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Veröffentlicht in:	IEEE photonics technology letters 2010-04, Vol.22 (7), p.486-488
Hauptverfasser:	Lo, J.F.-J., Butte, P., Qiyin Fang, Shih-Jui Chen, Papaioanou, T., Eun-Sok Kim, Gundersen, M., Marcu, L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Diffraction Fluorescence Lenses Microlens Microoptics microspectrometer multilayer Packaging piezoelectric Prototypes Spectroscopy Throughput Time domain analysis Wafer scale integration wafer-level packaging
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