A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process
Photonic integrated circuits based on polymer waveguides have great potential as low-cost optical devices. A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining the waveguides and for use as both core and cladding layer for the waveguides. The waveguide circ...
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| Veröffentlicht in: | IEEE photonics technology letters 2009-09, Vol.21 (18), p.1323-1325 |
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| container_title | IEEE photonics technology letters |
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| creator | Jie Teng Scheerlinck, S. Hongbo Zhang Xigao Jian Morthier, G. Beats, R. Xiuyou Han Mingshan Zhao |
| description | Photonic integrated circuits based on polymer waveguides have great potential as low-cost optical devices. A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining the waveguides and for use as both core and cladding layer for the waveguides. The waveguide circuits are replicated by a simple ultraviolet-based soft lithography method consisting of two steps. All-polymer microring resonators are fabricated by this approach and characterized. About 6-dB extinction ratio at the through port and 18-dB extinction ratio at the drop port is demonstrated. A Q-factor of 4.2 times 10 4 is obtained. Extracted from the measured spectrum, the scattering loss of the ring waveguides is estimated to be about 1.6 dB/cm. This easy fabrication technique can be easily extended to fabricate other devices. |
| doi_str_mv | 10.1109/LPT.2009.2026551 |
| format | Article |
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A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining the waveguides and for use as both core and cladding layer for the waveguides. The waveguide circuits are replicated by a simple ultraviolet-based soft lithography method consisting of two steps. All-polymer microring resonators are fabricated by this approach and characterized. About 6-dB extinction ratio at the through port and 18-dB extinction ratio at the drop port is demonstrated. A Q-factor of 4.2 times 10 4 is obtained. Extracted from the measured spectrum, the scattering loss of the ring waveguides is estimated to be about 1.6 dB/cm. 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(IEEE) 2009</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c323t-1cf0d900d0e72240b5ad23a87695c21077024afae85c8f636563a871103bec933</citedby><cites>FETCH-LOGICAL-c323t-1cf0d900d0e72240b5ad23a87695c21077024afae85c8f636563a871103bec933</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5165059$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5165059$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Jie Teng</creatorcontrib><creatorcontrib>Scheerlinck, S.</creatorcontrib><creatorcontrib>Hongbo Zhang</creatorcontrib><creatorcontrib>Xigao Jian</creatorcontrib><creatorcontrib>Morthier, G.</creatorcontrib><creatorcontrib>Beats, R.</creatorcontrib><creatorcontrib>Xiuyou Han</creatorcontrib><creatorcontrib>Mingshan Zhao</creatorcontrib><title>A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description>Photonic integrated circuits based on polymer waveguides have great potential as low-cost optical devices. A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining the waveguides and for use as both core and cladding layer for the waveguides. The waveguide circuits are replicated by a simple ultraviolet-based soft lithography method consisting of two steps. All-polymer microring resonators are fabricated by this approach and characterized. About 6-dB extinction ratio at the through port and 18-dB extinction ratio at the drop port is demonstrated. A Q-factor of 4.2 times 10 4 is obtained. Extracted from the measured spectrum, the scattering loss of the ring waveguides is estimated to be about 1.6 dB/cm. 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| ispartof | IEEE photonics technology letters, 2009-09, Vol.21 (18), p.1323-1325 |
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| source | IEEE Electronic Library (IEL) |
| subjects | Devices Extinction Extinction ratio Imprint Lithography Loss measurement microring resonator Noise levels Optical devices Optical polymers Optical resonators Optical scattering Optical waveguides Photonic integrated circuits Photonics polymer waveguides Ports Q factor Resonators Soft lithography Waveguides |
| title | A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process |
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