Integrated MEMS RF Probe for SEM Station-Pad Size and Parasitic Capacitance Reduction

This letter describes a new generation of instrumentation that aims to address both on-wafer measurement of nano-devices in the microwave regime and reduction of probing pads parasitic effects. The system consists of a scanning electron microscope equipped with XYZ nano-positioners and in-house MEMS...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IEEE microwave and wireless components letters 2015-10, Vol.25 (10), p.693-695
Hauptverfasser:	El Fellahi, A., Haddadi, K., Marzouk, J., Arscott, S., Boyaval, C., Lasri, T., Dambrine, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Calibration Coplanar waveguides Electrical resistance measurement Engineering Sciences Microelectromechanical systems (MEMS) ground-signal-ground (GSG) probe Microwave measurement microwaves nano-devices on-wafer measurements Parasitic capacitance Probes Radio frequency radio frequency (RF) probe scanning electron microscope
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!