Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}\times {7} array along with the analog-front-end circuit has been configured to work as a linear...

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