Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS
In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}\times {7} array along with the analog-front-end circuit has been configured to work as a linear...
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| Veröffentlicht in: | IEEE electron device letters 2022-07, Vol.43 (7), p.1113-1116 |
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| container_title | IEEE electron device letters |
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| creator | Zamora, I. Ledesma, E. Uranga, A. Barniol, N. |
| description | In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The {7}\times {7} array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single {7}\times {1} AlScN PMUT-on-CMOS channel as a receiver has been obtained. |
| doi_str_mv | 10.1109/LED.2022.3175323 |
| format | Article |
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The <inline-formula> <tex-math notation="LaTeX">{7}\times {7} </tex-math></inline-formula> array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single <inline-formula> <tex-math notation="LaTeX">{7}\times {1} </tex-math></inline-formula> AlScN PMUT-on-CMOS channel as a receiver has been obtained.]]></description><identifier>ISSN: 0741-3106</identifier><identifier>EISSN: 1558-0563</identifier><identifier>DOI: 10.1109/LED.2022.3175323</identifier><identifier>CODEN: EDLEDZ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Acoustic beams ; Acoustic transducers ; Acoustics ; Analog circuits ; Beam steering ; CMOS ; Delays ; Directivity ; Imaging ; Micromachining ; Phased arrays ; piezoelectric micromachined ultrasonic transducers (PMUT) ; Piezoelectricity ; PMUT-on-CMOS ; Signal to noise ratio ; Transducers ; Ultrasonic imaging ; ultrasound imaging</subject><ispartof>IEEE electron device letters, 2022-07, Vol.43 (7), p.1113-1116</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2022</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c221t-12e2bef2a112390a98a4ee89562adc8fb550ee8c214ca871fa60348a23a48b8f3</citedby><cites>FETCH-LOGICAL-c221t-12e2bef2a112390a98a4ee89562adc8fb550ee8c214ca871fa60348a23a48b8f3</cites><orcidid>0000-0001-6325-2166 ; 0000-0002-6967-6565 ; 0000-0002-3593-4060 ; 0000-0003-3787-4708</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9775091$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/9775091$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Zamora, I.</creatorcontrib><creatorcontrib>Ledesma, E.</creatorcontrib><creatorcontrib>Uranga, A.</creatorcontrib><creatorcontrib>Barniol, N.</creatorcontrib><title>Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS</title><title>IEEE electron device letters</title><addtitle>LED</addtitle><description><![CDATA[In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The <inline-formula> <tex-math notation="LaTeX">{7}\times {7} </tex-math></inline-formula> array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single <inline-formula> <tex-math notation="LaTeX">{7}\times {1} </tex-math></inline-formula> AlScN PMUT-on-CMOS channel as a receiver has been obtained.]]></description><subject>Acoustic beams</subject><subject>Acoustic transducers</subject><subject>Acoustics</subject><subject>Analog circuits</subject><subject>Beam steering</subject><subject>CMOS</subject><subject>Delays</subject><subject>Directivity</subject><subject>Imaging</subject><subject>Micromachining</subject><subject>Phased arrays</subject><subject>piezoelectric micromachined ultrasonic transducers (PMUT)</subject><subject>Piezoelectricity</subject><subject>PMUT-on-CMOS</subject><subject>Signal to noise ratio</subject><subject>Transducers</subject><subject>Ultrasonic imaging</subject><subject>ultrasound imaging</subject><issn>0741-3106</issn><issn>1558-0563</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kN9PwjAQxxujifjj3cSXJT4Pe-26dY-IqCQgJMBzc3SdlIwV2-0B_3qHEJ_uLvl873IfQh6A9gFo_jwZvfYZZazPIROc8QvSAyFkTEXKL0mPZgnEHGh6TW5C2FIKSZIlPbKfbzCYIhp4j4fo5a93dTSoFvozmlvz40xldOOtjqZWe7dDvbF1B62qxmNwbV1ES491KFptfIimrnaVbTZWY1UdonHdmC-PzWnrcDpb3JGrEqtg7s_1lqzeRsvhRzyZvY-Hg0msGYMmBmbY2pQMARjPKeYSE2NkLlKGhZblWgjazZpBolFmUGJKeSKRcUzkWpb8ljyd9u69-25NaNTWtb7uTiqWSpaD4FR2FD1R3WsheFOqvbc79AcFVB29qs6rOnpVZ69d5PEUscaYfzzPMkFz4L8x2XRm</recordid><startdate>20220701</startdate><enddate>20220701</enddate><creator>Zamora, I.</creator><creator>Ledesma, E.</creator><creator>Uranga, A.</creator><creator>Barniol, N.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0001-6325-2166</orcidid><orcidid>https://orcid.org/0000-0002-6967-6565</orcidid><orcidid>https://orcid.org/0000-0002-3593-4060</orcidid><orcidid>https://orcid.org/0000-0003-3787-4708</orcidid></search><sort><creationdate>20220701</creationdate><title>Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS</title><author>Zamora, I. ; Ledesma, E. ; Uranga, A. ; Barniol, N.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c221t-12e2bef2a112390a98a4ee89562adc8fb550ee8c214ca871fa60348a23a48b8f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Acoustic beams</topic><topic>Acoustic transducers</topic><topic>Acoustics</topic><topic>Analog circuits</topic><topic>Beam steering</topic><topic>CMOS</topic><topic>Delays</topic><topic>Directivity</topic><topic>Imaging</topic><topic>Micromachining</topic><topic>Phased arrays</topic><topic>piezoelectric micromachined ultrasonic transducers (PMUT)</topic><topic>Piezoelectricity</topic><topic>PMUT-on-CMOS</topic><topic>Signal to noise ratio</topic><topic>Transducers</topic><topic>Ultrasonic imaging</topic><topic>ultrasound imaging</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zamora, I.</creatorcontrib><creatorcontrib>Ledesma, E.</creatorcontrib><creatorcontrib>Uranga, A.</creatorcontrib><creatorcontrib>Barniol, N.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE electron device letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Zamora, I.</au><au>Ledesma, E.</au><au>Uranga, A.</au><au>Barniol, N.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS</atitle><jtitle>IEEE electron device letters</jtitle><stitle>LED</stitle><date>2022-07-01</date><risdate>2022</risdate><volume>43</volume><issue>7</issue><spage>1113</spage><epage>1116</epage><pages>1113-1116</pages><issn>0741-3106</issn><eissn>1558-0563</eissn><coden>EDLEDZ</coden><abstract><![CDATA[In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The <inline-formula> <tex-math notation="LaTeX">{7}\times {7} </tex-math></inline-formula> array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT's behavior, showing a small dispersion in terms of frequency, bandwidth, and sensitivity. The feasibility of easily performing a transmission beam steering and focusing has been proven. In particular, the beam directivity has been characterized in terms of the width of the main lobe. The integrated CMOS analog-front-end allows the reduction of parasitic elements and noise, improving the signal to noise ratio (SNR). As a proof of concept, a B-mode image, with a 16 dB dynamic range, using a single <inline-formula> <tex-math notation="LaTeX">{7}\times {1} </tex-math></inline-formula> AlScN PMUT-on-CMOS channel as a receiver has been obtained.]]></abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LED.2022.3175323</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0001-6325-2166</orcidid><orcidid>https://orcid.org/0000-0002-6967-6565</orcidid><orcidid>https://orcid.org/0000-0002-3593-4060</orcidid><orcidid>https://orcid.org/0000-0003-3787-4708</orcidid></addata></record> |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acoustic beams Acoustic transducers Acoustics Analog circuits Beam steering CMOS Delays Directivity Imaging Micromachining Phased arrays piezoelectric micromachined ultrasonic transducers (PMUT) Piezoelectricity PMUT-on-CMOS Signal to noise ratio Transducers Ultrasonic imaging ultrasound imaging |
| title | Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS |
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