Design and Characterization of a Capacitive Micromachined Transducer With a Deflectable Bottom Electrode

Multiple moving membrane capacitive micromachined ultrasonic transducers (M 3 -CMUTs) employ a multiple vibrating plate configuration. The presence of an additional plate improves the transducer properties. In this letter, the device displacement amplitude is further enhanced through eliminating the...

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Veröffentlicht in:	IEEE electron device letters 2015-06, Vol.36 (6), p.612-614
Hauptverfasser:	Emadi, Tahereh Arezoo, Buchanan, Douglas A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Deflectable bottom electrode Displacement measurement Displacement Profile Electrodes Impedance Microelectromechanical System Micromechanical devices Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Transducers Ultrasonic transducers Voltage measurement
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