Multiple Moving Membrane CMUT With Enlarged Membrane Displacement and Low Pull-Down Voltage

A multiple moving membrane capacitive micromachined ultrasonic transducer ( M 3 -CMUT) has been fabricated and is shown to exhibit a significantly enlarged total membrane displacement ( ~ 280 nm) compared with the displacement of a conventional CMUT ( ~ 85 nm) for the same bias voltage. The M 3 -CMU...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE electron device letters 2013-12, Vol.34 (12), p.1578-1580
Hauptverfasser:	Emadi, Tahereh Arezoo, Buchanan, Douglas A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Applied sciences Capacitance Capacitive micromachined ultrasonic transducer (CMUT) Cavity resonators Electrodes Electronics Exact sciences and technology Micro- and nanoelectromechanical devices (mems/nems) microelectromechanical system (MEMS) Microelectromechanical systems Microelectronic fabrication (materials and surfaces technology) pull-down voltage Resonant frequency sacrificial layer Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transducers Ultrasonic imaging Ultrasonic transducers Voltage measurement
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!